NDLI: Mach-Zehnder MEMS interferometer with two Si/Air beam splitters

Content Provider	IEEE Xplore Digital Library
Author	Omran, H. Medhat, M. Saadany, B. Khalil, D.
Copyright Year	2009
Description	Author affiliation: Faculty of Engineering, Ain Shams University, 1 Elsarayat St. Abbassia, 11517, Cairo, Egypt (Omran, H.; Khalil, D.) \|\| MEMS Division of Si-Ware Systems, 3 Khalid Ibn Al-Waleed St., Heliopolis, Cairo 11361, Egypt (Medhat, M.; Saadany, B.)
Abstract	In this work we present a novel MEMS interferometer based on the Mach-Zehnder (MZ) architecture. The interferometer is fabricated by deep reactive ion etching (DRIE) technology on an SOI wafer. The new structure is based on the use of two Si/Air beam splitters [1] and two metallic mirrors, integrated with a comb drive actuator on a single die. The whole structure is integrated on one chip and no parts are assembled from outside the structure. By moving the mirrors using the integrated comb drive actuator, the structure is tested as an FTIR spectrometer. The two wavelengths 1525 nm and 1575 nm have been successfully identified using it.
Starting Page	1
Ending Page	4
File Size	974099
Page Count	4
File Format	PDF
ISBN	9781424457489
e-ISBN	9781424457502
DOI	10.1109/IDT.2009.5404129
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-11-15
Publisher Place	Saudi Arabia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical interferometry Actuators Particle beam optics Mach-Zehnder interferometer Biomedical optical imaging Interferometric lithography DRIE SOI Micromechanical devices Fourier transform infrared (FTIR) spectrometry Mirrors Optical noise Assembly Signal to noise ratio
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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