NDLI: Design of a three-component force sensor based on MEMS strain gauges

Content Provider	IEEE Xplore Digital Library
Author	Yingxue Li Yulong Zhao Minghao Zhang Peng Wang
Copyright Year	2015
Description	Author affiliation: State Key Lab. for Manuf. Syst. Eng., Xi'an Jiaotong Univ., Xi'an, China (Yingxue Li; Yulong Zhao; Minghao Zhang; Peng Wang)
Abstract	This paper presents a three-component force sensor with MEMS gauges attached to its sensitive beams, which could be monolithically machined without assembly. All the sensitive areas of the dynamometer are designed on outer surfaces, which could contribute to the bond of gold wires onto the MEMS chips. Rough theoretical models are abstracted based on Euler beam theories, and Wheastone bridge circuits are provided according to the finite element simulations under loadings. Optimizations of dimensions are discussed to obtain isotropic sensitive outputs and minimized coupling errors. Finally with the help of simulation software, the safety factor and natural frequencies are also given. This design puts forward a solution with cost effective and maintenance friendly for both static and dynamic force measurements.
Sponsorship	IEEE Nanotechnol. Council
Starting Page	597
Ending Page	601
File Size	684867
Page Count	5
File Format	PDF
ISBN	9781467366953
DOI	10.1109/NEMS.2015.7147500
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-04-07
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Force Stress Robot sensing systems Strain Force sensors Micromechanical devices Bridge circuits MEMS application force measurement three-component force sensor MEMS gauge
Content Type	Text
Resource Type	Article

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