NDLI: Design and multipoint control of an bar-shaped multi-DOF ultrasonic actuator

Content Provider	IEEE Xplore Digital Library
Author	Xiangyu Zhou Junkao Liu Weishan Chen
Copyright Year	2014
Description	Author affiliation: Dept. of Mechatron. Eng., Harbin Inst. of Technol., Harbin, China (Xiangyu Zhou; Junkao Liu; Weishan Chen)
Abstract	A bar-shaped multi-degree-of freedom (DOF) ultrasonic actuator has been developed for use in precision positioning stage device, such as X-Y table, etc. Six piezoelectric ceramic groups are located to excite a longitudinal vibration and two bending vibrations of the actuator respectively. The working principle of proposed actuator is analyzed. The actuator can work as three kinds of ultrasonic actuator, wobble actuator, linear actuator and multi-DOF actuator. Different from most bar-shaped multi-DOF ultrasonic actuator, the two ends of the proposed ultrasonic actuator can generate different 3-DOF motion trajectories simultaneously, using three driving control method with the combination of the three vibration modes. The actuator was designed by finite element analysis (FEA), and transient analysis is employed to testify the three kinds of multipoint control method for the bar-shaped ultrasonic actuator. The velocity and moving direction of actuator can by adjusted by using the appropriate control method and voltage amplitudes of the input electric signals. Multipoint multi-DOF motion control of the actuator was achieved successfully.
Starting Page	447
Ending Page	451
File Size	529726
Page Count	5
File Format	PDF
ISBN	9781479939787
e-ISBN	9781479939794
DOI	10.1109/ICMA.2014.6885739
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-08-03
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Actuators Acoustics Trajectory Vibrations Finite element analysis Electrodes Voltage control multi-DOF Ultrasonic actuator multipoint
Content Type	Text
Resource Type	Article

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