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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Zhaomin Tong Cheyang Xue Binzhen Zhang Jian Wang Shang Chen |
| Copyright Year | 2007 |
| Description | Author affiliation: North Univ. of China, Taiyuan (Zhaomin Tong; Cheyang Xue; Binzhen Zhang; Jian Wang; Shang Chen) |
| Abstract | This paper reports an acoustic sensor based on AlAs/InGaAs/GaAs resonant tunnelling diode (RTD). The RTD is incorporated in a 10 mum thick cantilever using inductivity coupled plasma (ICP) technology and the fabrication of the cantilever diaphragm is based upon micro machined control holes technology by ICP too. Pressure applied to RTD changes its current-voltage characteristics, which can be used on sensor design. Comparing with sensors using Si technology, this type of sensor has excellence features, such as indecisive of temperature effects, high sensitivity, half-digital outputs and so on. Because of the restriction of RTD's fabricated technology, the negative differential region (NDR) of RTD hasn't been used in this batch, which induces the sensor's sensitivity is not very high. Elementary measurements show the acoustic sensor has a good frequency response in 500 HZ region between 1.3 KHZ and 1.8 KHz, and its sensitivity up to 0.1 muv/Pa with frequency f=1.3 KHZ. |
| Starting Page | 3807 |
| Ending Page | 3811 |
| File Size | 746183 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781424408276 |
| DOI | 10.1109/ICMA.2007.4304181 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-08-05 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Acoustic sensors Resonant tunneling devices Gallium arsenide Indium gallium arsenide Sensor phenomena and characterization Temperature sensors Diodes Plasma properties Fabrication Thickness control Control holes Acoustic sensor RTD Air-bridge ICP |
| Content Type | Text |
| Resource Type | Article |
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