NDLI: Hydrogen Sensing Characteristics of Porous Pd/SiO/GaN Schottky Diode

Content Provider	IEEE Xplore Digital Library
Author	Yu-Jen Chen Yen-I Chou Chung-Yeh Wu Shih-Da Lin Yu-Wei Huang Huey-Ing Chen
Copyright Year	2007
Description	Author affiliation: Nat. Cheng Kung Univ., Tainan (Yu-Jen Chen)
Abstract	In this work, the porous $Pd/SiO_{2}/GaN$ Schottky diode was fabricated by thermal evaporation (TE) for hydrogen sensing. The current-voltage (I-V) characteristics of the studied device were measured under hydrogen concentrations of 15 - 9970 ppm $H_{2}/air$ and temperatures of 303 - 515 K. Furthermore, the hydrogen sensing performances of this device were investigated via the steady-state and transient detections. From experimental results, the studied device demonstrated excellent sensing performances with low detection limit (about ppb level), wide detection range (15 -9970 ppm), high sensitivity, and fast response and recovery rates (within several seconds for detection of 9970 ppm $H_{2}/air).$ For the detection of 15 ppm at 423 K, the relative sensitivity even reached to 490%. In addition, the relative sensitivity was increased as either the hydrogen concentration or the detection temperature was incresaed. As compared with the dense structured device, the porous structured Pd/ $SiO_{2}/GaN$ Schottky diode exhibited more superior sensing characteristics, especially at low hydrogen concentration with a relatively high sensitivity.
Starting Page	793
Ending Page	796
File Size	2473211
Page Count	4
File Format	PDF
ISBN	9781424406364
DOI	10.1109/EDSSC.2007.4450245
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-12-20
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Hydrogen Schottky diodes Gallium nitride Temperature sensors Atomic layer deposition Schottky barriers Surface morphology Insulation Chemical vapor deposition Tellurium
Content Type	Text
Resource Type	Article

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