NDLI: A dual-mode built-in self-test technique for capacitive MEMS devices

Content Provider	IEEE Xplore Digital Library
Author	Xingguo Xiong Yu-Liang Wu Wen-Ben Jone
Copyright Year	2004
Description	Author affiliation: Dept. of ECECS, Univ. of Cincinnati, OH, USA (Xingguo Xiong)
Abstract	A built-in self-test (BIST) scheme which partitions the fixed (instead of movable) capacitance plates of a capacitive MEMS device is proposed. The BIST technique divides the fixed capacitance plate(s) at each side of the movable microstructure into three portions: one for electrostatic activation and the other two equal portions for capacitance sensing. Due to such partitioning, the BIST technique can be applied to surface-, bulk-micromachined MEMS devices and other technologies. Further, sensitivity and symmetry BIST methods based on this partitioning are also introduced. The combination of both BIST modes covers a larger defect set, thus a robust testing for the device can be expected. The BIST technique is verified by three typical capacitive MEMS devices. Simulation results show that the proposed technique is an effective BIST solution for various capacitive MEMS devices.
Sponsorship	IEEE Comput. Soc. Test Technol. Tech. Council
Starting Page	148
Ending Page	153
File Size	1399795
Page Count	6
File Format	PDF
ISBN	0769521347
ISSN	10930167
DOI	10.1109/VTEST.2004.1299238
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-04-25
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Built-in self-test Microelectromechanical devices Testing Capacitance Voltage Micromechanical devices Electrostatics Robustness Integrated circuit technology Calibration
Content Type	Text
Resource Type	Article

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