NDLI: Optically Detected, Framed Silicon Cantilever for High Precision Acoustic Sensing

Content Provider	IEEE Xplore Digital Library
Author	Sievila, P. Fonsen, J. Hahtela, O. Chekurov, N. Kauppinen, J. Tittonen, I.
Copyright Year	2007
Description	Author affiliation: Helsinki Univ. of Technol., Espoo (Sievila, P.)
Abstract	Optically readable silicon cantilevers have been designed, fabricated and applied to photoacoustic spectroscopy. The working principle is based on detecting the acoustic wave induced displacement of the cantilever with laser interferometry. The rectangular, 9.5 mum thick components were fabricated using two-sided anisotropic etching of silicon-on insulator (SOI) wafers. The flexible cantilever is surrounded by narrow gaps from three sides and it moves very sensitively relative to the thick frame. The cantilever sensor has been applied to detect weak pressure variations in trace gas analysis and it has been shown to improve the sensitivity of photoacoustic measurements by many orders of magnitude.
Starting Page	2605
Ending Page	2608
File Size	822974
Page Count	4
File Format	PDF
ISBN	1424408415
DOI	10.1109/SENSOR.2007.4300705
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-10
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical sensors Acoustic signal detection Optical detectors Silicon Optical interferometry Geometrical optics Optical design Spectroscopy Acoustic waves Anisotropic magnetoresistance Photoacoustics Silicon cantilever Optical sensor Gas sensing
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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