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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yoon, H.J. Song, S.H. Cho, J.B. Jung, K.W. Lee, S. Koh, K.H. Yang, S.S. |
| Copyright Year | 2007 |
| Description | Author affiliation: Ajou Univ., Suwon (Yoon, H.J.; Song, S.H.; Yang, S.S.) |
| Abstract | This paper presents the fabrication of an ion source using carbon nanoparticle field emitters for a micro time-of-flight mass spectrometer (TOFMS). The micro TOFMS consists of a glass substrate with several electrodes and a silicon substrate with carbon nanoparticle (CNP) field emitters. The type of CNP field emitters is the triode type with which we can control the emission current at low voltage. The CNP layer is grown by hot-filament chemical-vapor deposition (HFCVD). The size of the assembled device is 10 times10 times 1 mm . The emission current of the ion source can be controlled from 0 to 94.3 muA when the gate voltage varies from 0 to 85 V. |
| Starting Page | 1067 |
| Ending Page | 1070 |
| File Size | 2141850 |
| Page Count | 4 |
| File Format | |
| ISBN | 1424408415 |
| DOI | 10.1109/SENSOR.2007.4300318 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-06-10 |
| Publisher Place | France |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Fabrication Ion sources Carbon dioxide Mass spectroscopy Voltage control Glass Electrodes Silicon Low voltage Chemicals field emitter ion source mass spectrometer carbon nanoparticle |
| Content Type | Text |
| Resource Type | Article |
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