NDLI: Smart Individual Switch Addressing of 5 × 5 and 20 × 20 MEMS Double-Switch Arrays

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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

Welcome to TRANSDUCERS '07 & EUROSENSORS XXI

Conference Organizers and Committee Members

Contributors, Exhibitors and Media Sponsors

Program at a Glance

Table of contents

MEMS and Nano Technology for the Handheld, Portable Electronic and the Automotive Markets

Concepts for Carbon Nanotube Sensors

Micro and Nano Chemical System on Chip

Contraction Measurements of Cardiomyocytes Grown on Silicon Cantilevers

Micro Heater with PT-CR Thin Film Thermo-Couple for High Speed Biological Measurements

Spatially Focused Reagent Injection System for Cell Analysis using 3-D Sheath Flow Scanner

Monolithic Integration of Micro-Channel on Disposable Flow Sensors for Medical Applications

Autonomous Genetic Analysis System to Study Space Effects on Microorganisms: Results from Orbit

A Manufacturable Chip-Scale Atomic Clock

From the Implementation to the Characterisation and Assembling of Microfabricated Optical Alcali Vapor Cell for MEMS Atomic Clocks

MEMS Oscillators for High Volume Commercial Applications

A Low-Voltage Temperature-Stable Micromechanical Piezoelectric Oscillator

Novel Ultrasound Read-Out for a Wireless Implantable Passive Strain Sensor (WIPSS)

7-GHZ CMOS RF Front-End Monolithically Integrated with Inverted-F Antenna for Wireless Sensor System

Closed-Loop Transductor-Compensated Class E Driver for Inductive Links

An Implantable Microsystem for Wireless Multi-Channel Cortical Recording

Wirelessly Powered Sensor Transponder for UHF RFID

Achievements and Perspectives of the Drie Technology for the Microsystems Market

A New Method for High-Rate Deep Dry Etching of Silicate Glass with Variable ETCH Profile

A Novel Deep Hole Etching in NLD Plasma Low GWP Gases

Formation of Silicon Nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching Process

The Progress of Biochip Development for Research and Consumer Market

Scanning Magnetic Tunnel Junction Sensor for the Detection of Magnetically Labeled DNA Microarray

Characterization of a D-Amino Acid Oxidase Microbiosensor for D-Serine Detection in the Central Nervous System

Towards the Formation of Neuro-Transistor Artificial Chemical Synapse

Advances in Thick-Film Sensors

Direct Metal Imprinting Lithography Based on Pulsed Laser Heating

Full Wafer Fabrication Process for Microfluidic Glass Chips with Electroplated Electrodes

Evaporative Printing of Organic Materials at Ambient Pressure using a Micromachined Printhead

A Surface Mountable Glucose Fuel Cell for Medical Implants

Harvesting Energy from Vibrations by a Micromachined Electret Generator

Microstructured In-Plane Thermoelectric Generators with Optimized Heat Path

Tunable Capacitor Based on Polymer-Dispersed Liquid Crystal for Optimum Micro-Power Harvesting

Electrostatic Transducers for Micro Energy Harvesting Based on SOI Technology

Novel Effa-Based Thin-Film RF-MEMS Technology

A 3V Operation RF MEMS Variable Capacitor using Piezoelectric and Electrostatic Actuation with Lithographical Bending Control

Smart Individual Switch Addressing of 5 × 5 and 20 × 20 MEMS Double-Switch Arrays

An Rfmems Switched Capacitor Array for a Tunable Band Pass Filter

Monolithic Phase Shifter Based on Mechanically Tunable Saw Delay Line

Non-Contact Nanoliter & Picoliter Liquid Dispensing

High Generation Rate of Uniform Oil-In-Water Droplets Formed by Multi-Stage Divergence Microflow Device

Inkjet Printhead Arrays with No Separating Wall Between Bubbles

Studies of Phosphorylation During Innate Immune Signaling using On-Chip Cell Preparation and Downstream Flow Cytometry

Preparation and Characterization of Tin Oxide Nanowires on SIC

SWNT Growth by LPCVD on Ferritin-Based Iron Catalyst Nanoparticles Towards CNT Sensors

Simple Technique for Direct Patterning of Nanowires using a Nanoslit Shadow-Mask

Towards Reliable 100-Nanometer Scale Stencil Lithography on Fullwafer: Progress and Challenges

Polymer Surface Morphology Control for Microfluidic Devices

A Three Dimensional Real-Time MEMS Based Optical Biopsy System for In-Vivo Clinical Imaging

A Novel Micro-Biopsy Actuator for Capsular Endoscope using LIGA Process

Photochemically Patterned Biliary Stents with Integrated Permanent Magnets and Deformable Assembly Features for Wireless Magnetoelastic Tissue Growth Sensing

Optical Characterisation of Bone Tissue for Diffusion Optical Tomography Applied to Skeletal Implants

An in Vivo Blood Microsampling Device for Pharmacokinetic Applications

Cmos-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy

Monolithic 0.35-μm CMOS Cantilever for Mass Sensing in the Attogram Range with Self-Excitation

Coupling Resonant Micro and Nanocantilevers to Improve Mass Responsivity by Detectability Product

Dual-Harmonic Oscillator for Quartz Crystal Resonator Sensors

Geometrical Optimization of Resonant Cantilever Sensors

Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS Preconcentration

Rapid Micro Array System for Passive Batch-Filling and Parallel-Printing Protein Solutions

High Through-Put Parallel Biomolecules Sorting Microsystem with Three Dimensional PDMS Stack

PPB-Level Detection of Benzene Diluted in Water by Bubbling Extraction System and UV Spectroscopy Based Measurements

Monodisperse Double Emulsions Generated by Microfluidic Chips Utilizing Flow Focusing and Pneumatic Chopping Devices

Radioisotope Powered Electrostatic Microactuators and Electronics

A Wideband Electromagnetic Micro Power Generator for Wireless Microsystems

3D Silicon Betavoltaics Microfabricated using a Self-Aligned Process for 5 Milliwatt/CC Average, 5 Year Lifetime Microbatteries

Design and Fabrication of MEMS-Based Monolithic Fuel Cells

Power Efficient V-Shape Electro-Thermal Actuator using Constrained SU-8

Surface Hydrophilic Polyurea Film for PMMA Blood Analysis Chip Realized by Vacuum Ultraviolet Light Irradiation

Droplet Manipulation by Electrowetting on Polymer Dispersed Liquid Crystal

Micro/NANO-Friction and Thermal-Mechanical Properties of Polymer Thin-Film Investigated with an Integrated SPM Probe Array

Ultra-Thick Optical Components using LF55GN Photosensitive Flexopolymer

An MSI Micromechanical Differential Disk-Array Filter

Aqueous Transduction of Poly-Sige Disk Resonators

Micromachined Bulk Wave Acoustic Bandgap Devices

UHF Nickelmicromechanical Spoke-Supported Ring Resonators

Phase Noise and Frequency Stability of Very-High Frequency Silicon Nanowire Nanomechanical Resonators

Using MEMS to Build the Device and the Package

A Generic Environment-Resistant Packaging Technology for MEMS

The Influence of surface Profile on Leakage in Roomtemperature Seal-Bonding

Thin Filmencapsulation of microstructures using Sacrificial CF-Polymer

Healthcare Chip for Home Medical Diagnosis

In-Vitro Rapid Centimeter-Scale Reconstruction of Lobule-Mimetic Liver Tissue Employing Dielectrophoresis-Based Cell Patterning

Hydrolyticmicroneedles as Transdermal Drug Delivery System

A Low Power, Microvalve-Regulated Drug Delivery System using a SI Micro-Spring Pressurized Balloon Reservoir

Dielectric Charging Sensitivity on MEMS Switches

Effects of Relative Humidity and Actuation Voltage on MEMS Reliability

Non-Destructive Functionality and Reliability Assessment of Dynamic MEMS using Acoustic Phonon Characterization

Effects of Environmental Condition on the Strength of Submicron-Thick Single Crystal Silicon Film

Comparison of Bulge Test and Point Deflection Methods for the Mechanical Characterisation of Submicron Thick Composite Membranes

A Novel Circular Ferro-Fluid Driven Flow-Through Microchip for Rapid DNA Amplification

One-Step Pathogen Specific DNA Extraction from Whole Blood on a Centrifugal Microfluidic Device

NANO-PCR: Breaking the Bottom Limit of the PCR Denaturation Temperature using Nanogold

Electrical and Mechanical Characteristics of DNA Bundles Revealed by Silicon Nanotweezers

Nanopore with Transverse Nanoelectrodes for Electrical Characterization and Sequencing of DNA

Self-Assembled ZNO Nanowires Via Local Vapor Transport Synthesis as UV Sensor

Process-Independent, Ultrasound-Enhanced, Electrostatic Batch Assembly

Micro-Scale System Integration Via Molten-Alloy Driven Self-Assembly and Scaling of Metal Interconnects

Multi-Object Conveyance by Peripherally Controlled Micro Actuator/Sensor Array

A Wafer Transfer Technology for Integration of RF MEMS and CMOS on Organic Substrate

Towards a Fully-Integrated CMOS-Based in VIVO Neural Imaging and Interface Device

An Autonomous Implantable Distraction Nail Controlled by an Inductive Power and Data Link

Wearable Line-of-Sight Detection System Utilizing Dye-Sensitized Photovoltaic Devices

Wearable Sensor System for Human Behavior Recognition (First Report: Basic Architecture and Behavior Prediction Method)

Three-Dimensional in VIVO Real Time Imaging by a Miniature Dual-Axes Confocal Microscope Based on a Two-Dimensional MEMS Scanner

Electrostatically Actuated Nonconductive Polymermicroresonators with Amplified Quality Factor in Gaseous and Aqueous Environment

Built-In Upwards-Bending Electrostatic Actuator Capable of Three-Level-Structural Variable Capacitor

Novelmicro Transportation Systems Based on Ratchetmechanism and Electrostatic Actuators

Dynamic Pull-In and Switching for Sub-Pull-In Voltage Electrostatic Actuation

A Totally Free Flexible Membrane: A Design for Low Electrostatic Actuation MEMS

Aqueous Droplets as Single-Molecule Reaction Containers

Using Electric Cell-Substrate Impedance Sensing to Measure Changes in the Projected Area of Individual Cells

Assembly of Single Cells Array using Image Dielectrophoresis

Phototransistor-Based Optoelectronic Tweezers for Cell Manipulation in Highly Conductive Solution

MEMS Process Flow Insensitive to Timed ETCH Induced Anchor Perimeter Variation on SOI and Bulk Silicon Wafer Substrates

Wet Release of Multipolymeric Structures with a Nanoscale Release Layer

Fabrication of Reinforced Nanoporous Membranes

Tapered Deep Reactive Ion Etching: Method and Characterization

In-Situ Isotropic and Anisotropic DRIE Sequence for Massive Parallel Multistage Brownian Ratchets

Fast Dry Fabrication Process with Ultra-Thin Atomic Layer Deposited Mask for Released MEMS-Devices with High Electromechanical Coupling

Silicon Undercut Characterization in a CMOS-MEMS Process

Nitrogen Doped Polcrystalline 3C-Sic Films Deposited by LPCVD for MEMS Applications

Electrodeposited Metal Structures in High Aspect Ratio Cavities using Vapor Deposited Polymer Molds and Laser Micromachining

Solid Phase Direct Write (SPDW) of Carbon Via Scanning Force Microscopy

Atomic Layer Deposition of Al2O3, TiO2 and ZnO Films into High Aspect Ratio Pores

Micropatterning of Streptavidin-Functionalized Magnetic Beads on Glass using Electrostatic Self-Assembly

Qualification and Applications of a Piezoelectric MEMS Process

A High Aspect Ratio, Flexible, Transparent and Low-Cost Parylene-C Shadow Mask Technology for Micropatterning Applications

Photosensitive Poly(Dimethylsiloxane) (Photopdms) for Rapid and Simple Polymer Fabrication

Thermally Driven Bimorph Nano Actuators Fabricated using Focused Ion Beam Chemical Vapor Deposition

Moving-Mask UV Lithography for 3-Dimensional Positive-And Negative-Tone Thick Photoresist Microstructuring

Cavity-Through Deep Reactive Ion Etching of Directly-Bonded Silicon Wafers

Mechanical Properties of Electrodeposited Permalloy Thin Film Measured by using a Tensile Test

A New Method for Protection of Anchors in Releasing Microstructure by using XeF2 Etching Process

Self-Formed High-Aspect-Ratio Polymer Nanopillars by RIE

Laser Microfabrication of Long Thin Holes on Biodegradable Polymer Under Vacuum and its Application to Collecting Blood

Tensile Testing of Single Crystal Silicon Thin Films at 800°C using IR Heating

Comparison of Improved Bulge and Microtensile Techniques for Mechanical Thin Film Characterization - Application to Polysilicon

Si3N4 Thin Films Proprerties for RF-MEMS Reliability Investigation

Study for the Design of Eddy Current Microsensor Arrays for Non Destructive Testing Applications

Highly Flexible SU-8 Microstructures

Modification of Sensing Properties of Thin Polymer Films by VUV Irradiation

Highly Oriented ZnO Thin Films Obtained with Low Temperature Annealing of Sol-Gel Coatings

Contact Angle Hysteresis Characterization of Textured Super-Hydrophobic Surfaces

Temperature Dependent Mechanical Properties of Doped Silicon Microcantilevers

Thermal Calibration of Heated Silicon Atomic Force Microscope Cantilevers

Soft-Landing and Bounce-Back Actuation for Active Stiction Control

Influence of Air Heat Exchange Upon On-Chip Measurement of Thermal Conductivity using MEMS Test Structures

Low Complexity Testing Micromachines Revealing Size-Dependent Mechanical Properties of Thin Al Films

Realization of Thin Film Specimens for Micro Tensile Tests

In-Situ Raman Spectroscopic Surface Stress Measurement of Single Crystal Silicon Microstructures Subjected to Uniaxial Tensile Loading

Extremely High Capacitance Ratio (C/R) RF MEMS Variable Capacitor with Chameleon Actuators

Non Linear Compact Modeling of RE-MEMS Switches by Means of Model Order Reduction

Characterization of CMOS Compatible RF MEMS Switch at Cryogenic Temperatures

Quality Factor and Resonance Frequency Shift Due to Air in RF MEMS Radial Disk Resonators

A Plastic W-Band MEMS Phase Shifter

Modeling and Measurement of the Dynamic Performance of an OHMIC Contact-Type RF MEMS Switch

Circular Plate Electrostatic Zipping Actuator for the Application of a Tunable Electromagnetic Cavity Resonator

Metal-Transfer-Micromolding of Air-Lifted RF Components

Monolithic RF MEMS Probe Array System using RF MEMS SP3T Switches for Permittivity Measurement

Thermal Driven Metastructural Reconfigurable Millimeter Wave Antenna

Design and Fabrication of a Laterally Driven Bistable Electromagnetic Microrelay

Highly-Mobile 2D Micro Impact Actuator for Space Applications

A Low-Loss Single-Pole-Double-Throw (SPDT) Switch Circuit

Controlled Bio-Carriers Based on Magnetotactic Bacteria

High Throughput Cell Electroporation Array Fabricated by Single-Mask Inclined UV Lithography Exposure and Oxygen Plasma Etching

A Tailored-Contour Aperture for Cellular Electrophysiology

Electrical Detection and Ejection of Beads in a One-Cell-Per-Drop Microdispenser

Label-Free, Microfluidic Separation of Human Breast Carcinoma and Epithelial Cells by Adhesion Difference

A Microfluidic Platform with Microacoustics and Dielectrophoresis for High Throughput Analyses of Spatiotemporal Signaling in Biological Cells

Meniscus-Assisted Magnetic Bead Trapping on Ewod-Based Digital Microfluidics for Specific Protein Localization

In-Droplet Magnetic Beads Concentration and Separation for Digital Microfluidics

Diamagnetic Levitation of Beads and Cells Above Permanent Magnets

Fabrication and Mechanical Characterization of Microneedle Array for Cell Surgery

Electrostatic Stretching of Hyaluronic Acid Molecule and Cutting with AFM Probe

Microsystem for Single-Cell Metabolomics

A Novel Device for Fixing Small Objects using Through-Pore Porous Silicon

Automated Fluidic System with a Chaotic Microfluidic Reaction Chamber for Rapid, Multi-Analyte Immunosensing

Temperature and Trapping Characterization of an Acoustic Lateral Trap for μ TAS

A Piezoelectrically-Actuated Valve for Modulation of Liquid at High Flow Rate Under High Pressure

Liquid Handling in a Microfluidic Chip by Micro-Aspiration

Non-Contact Detection of Free Flying Nanoliter Droplets

Predictable Three-Dimensional Microfluidic Channel Fabrication in a Single-Mask Process

A Simple Opto-Fluidic Switch Detecting Liquid Filling in Polymer-Based Microfluidic Systems

Microfluidic ATP-Bioluminesecence Sensor for Detection of Airborne Microbe

A Perfusion-Based Micro 3-D Cell Culture Platform

A 128-Pixel Digitally-Programmable Microfluidic Platform for Non-Contact Droplet Actuation using Marangoni Flows

An Electrical Particle Velocity Profiler for In-Channel Clogging Detection and Flow Pattern Characterization

Plug Dispersion Compensation in Moving Field Cappilary Electrophoresys Applications

A Microfluidic System for Automatic Cell Culture

Monolithic 3-D Microfluidic Device for Cell Assay with an Integrated Combinatorial Mixer

Silicon NANO-ESI Emitters for Mass Spectrometry: A Mixed Micromechanical and Microfluidic Design

Development of a Cellular Biochip Mimicking in Vitro Organs for Chronic Toxicity Analysis

High Throughput Cytotoxicity Screening using Photonic Crystal Biosensors

Probing the Adhesion and Viability of Individual Cells with Field-Effect Transistors

Fluorescent Labeling, Sensing and Differentiation of Leukocytes from Undiluted Whole Blood Samples

A Multi-Channel SPR Biomolecule Detection System using an Integrated PDMS Nano-Scale Grating Chip

An Investigation on a Vibration-Based Active Protein Desorption Mechanism for Implantable MEMS-Based Biosensor Applications

Fabrication and Packaging of Nanoporous Membrane Chips for Label-Free Ion-Channel Transducer Based Biosensor

Piezoelectric Micromembranes for the Fabrication of a Diagnostic Chip Based on the Real-Time Monitoring of Antigen-Antibody Interactions

Electrochemical Impedance Spectroscopy of the Cardiomyocyte Adhesion to Extracellular Matrix on Micro-Fabricated Biosensors

Biomolecular Sensing using Surface Micromachined Silicon Plates

A Delta-Sigma Approach for Ion Channel Based Biosensor Arrays

A Bio-Thermochemical Microbolometer with Immobilized Intact Liposome on Sensor Solid Surface

Cell-Based Microfluidic Biochip for Electrochemical Real-Time Monitoring of Glucose and Oxygen

Optimization of Gene Transfection Condition using Taguchi Method for an Electroporation Microchip

Single Living Cell Refractometry using FBG-Based Resonant Cavity

High Performance Blood Glucose Sensor using Charge Transfer Technique

Application of Vertical Micororeactor Stack with Polystylene Microbeads to Immuno Assay

Electromechanical Modeling of Micro Electret Generator for Energy Harvesting

Design, Simulation, and Fabrication of a Novel Vibration-Based Magnetic Energy Harvesting Device

Novel Micro Vibration Energy Harvesting Device using Frequency Up Conversion

A Low Cost Generator Concept for Energy Harvesting Applications

Fabrication and Test of Integrated Micro-Scale Vibration Based Electromagnetic Generator

Autonomous, Low Voltage, High Efficiency, CMOS Rectifier for Three-Phase Micro Generators

Integrated Power Harvesting System Including a MEMS Generator and a Power Management Circuit

Piezoelectric Harvesters and MEMS Technology: Fabrication, Modeling and Measurements

Innovative Structure for Mechanical Energy Scavenging

Ultraminiaturized Milliwatt-Scale Permanent Magnet Generators

Bio-Actuated Power Generator using Heart Muscle Cells on a PDMS Membrane

A Novel RF Induced DC Power Supply System for Integrated Ubiquitous Micro Sensor Devices

Micromachined Thermopiles for Energy Scavenging on Human Body

Performance and Design Issues of a Silicon Microfabricated Fuel Cell

Nanoimprint Fuel Cell for On-Chip Power Application

Monolithically Integrated Planar Micro Fuel Cell Arrays

Microfludic Centrifuge of Nano Particles using Rotating Flow in a Microchamber

On Chip Synthesis Approach for Biochips -From GemkeyTM DNA Chip to Future Glyco Chip

Novel Optoelectronic Platform using an Amorphous/Nanocrystalline Silicon Biosensor for the Specific Identification of Unamplified Nucleic Acid Sequences Based on Gold Nanoparticle Probes

High-Throughput Single-Cell Electroporation Microchip with Three Dimensional Si Microelectrodes for Gene Transfection

Integrated Microfluidic Chip for Fast Diagnosis of Piscine Nodavirus

Label-Free CMOS DNA Quantification with On-Chip Noise Reduction Schemes

Biosensor for the Detection of Specific DNA Sequences by Impedance Spectroscopy

A Robust Fluorescence Multiplex Immunoassay Biosensor Designed for Field Applications

On-Chip Control of DNA Immobilization and Hybridization with Nanosecond Electric Field Pulses

Novel Bacterial DNA Sample Preparation Method from Whole Blood using Surface-Modified Silicon Microstructures

Fabrication of Replicated DNA Microarray using Polyacrylamide Gel

Microfabricated Electrochemical Sensor for Chemical Warfare Agents: Smaller is Better

Nasicon-Based Planar-Type CO2 Sensor Attached with Solid Reference Electrode Stable Under High Humid Conditions

Solid State Gas Sensor for Fast Carbon Dioxide Detection

Planar, Impedance-Metric NOX Sensor with NiO Sensing Electrode for High Temperature Applications

Density Functional Theory Study of ZnO Nanostructures for NO and NO2 Sensing

Selective Gas Sensor System for CO and H2 Distinction at High Temperatures Based on a Langasite Resonator Array

A Simple Optical Gas Sensor Based on Micromachined Silicon Plasma Igniters and Image Processing

Four-Cantilever Trace Explosive Sensors with Dual SAMs Functionalized for Specific-Sensing Improvement and Nonspecific-Adsorption Depression

Work Place Monitoring using a High Sensitive Surface Acoustic Wave Based Sensor System

In-Situ Soil Gas Analysis with a Robust Sawsensor System Integrated in Percussion Driven Penetration Cones

Towards an All Polymeric Electronic Nose: Device Fabrication and Characterization, Electronic Control, Data Analysis

Single Carbon Nanotube Pirani Gauge By Local Synthesis

Fabrication and Evaluation of Carbon Nanotube-Parylene Functional Composite-Films

A Three Dimensional Thermal Sensor Based on Single-Walled Carbon Nanotubes

Chemical Sensitivity of Porphyrin Nanotubes

Site Controlled Nanotube Shell Etching for Interlayer Motion Based NEMS

Multi-Walled Carbon Nanotube Networks As Gas Sensors for NO2 Detection

New TiO2 and Carbon Nanotube Hybrid Microsensors for Detecting Traces of O2 in Beverage Grade CO2

Nanotube Micro-Opto-Mechanical Systems (N-MOMS)

Electrical and Electromechanical Characteristics of Nanoassembled Carbon Nanotube Thin Film Resistors on Flexible Substrates

Silicon Nanowire Array Bio-Sensor using Top-Down CMOS Technology

Using Dried Rhodamine B Fluorescence for Temperature Characterization of Sub-Micron Scale Devices

Development of Micro-Fluidic Nitrate-Selective Sensor Based on Polypyrrole Nanowires

Dielectrophoretic Characterization of SnO2 Nanobelts

Fabrication of an Ion Source using Carbon Nanoparticle Field Emitters for a Micro Time-of-Flight Mass Spectrometer

Electro-Mechanical Measurement of Nano Wires -Evaluation of Lambda DNA Wire Coated with Palladium Nano Particles

A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens

Polymer Microoptoelectromechanical Systems: Variable Optical Attenuators and Accelerometers

Novel Monocrystalline Silicon Micromirrors for Maskless Lithography

A PDMS-on-Silicon Deformable Grating for Spectral Differentiation of Mixed Wavelength Signals

Microlens Array Film with Full Fill Factor for Enhancing Outcoupling Efficiency from OLED Lighting

Chitosan-Mediated BioMEMS Platform for Optical Sensing

Micromachined Oblique Incidence Refleciometry (OIR) Probe for Skin Cancer Detection

Flip Chipped INGaAs Photodiode Arrays for Gated Imaging with Eye-Safe Lasers

A Light-Addressable Potentiometric Sensor System for Fast, Simultaneous and Spatial Detection of the Metabolic Activity of Biological Cells

A Dual Layer Scintillation Microdevice for Gamma and Beta Particle Energy Spectroscopy

Quantitative Chemical Analysis using DVDs and Conventional Computer Optical Disk Drives

A MEMS Based Optical Moire Approach for in Situ Cardiac Myocyte Force Probing

A Rotary Micromotor Supported on Microball Bearings

Micro Mass Flow Controller for a Mini-HCCI-Motor Driven Power Generator

MEMS Rotary Actuator using an Integrated Ball Bearing and Air Turbine

Homopolar Micromotor with Liquid Metal Rotor

Design and Fabrication of an Electrostatic Micromotor with a Low Operating Voltage

Differential Electrode Design for Electrostatic Actuator in Conducting Media

Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System

A DC-Powered High-Voltage Generator using a Bulk Pt-Rh Oscillating Micro-Relay

Frequency Transition Phenomenon of Self-Oscillated Micro-Cantilever by Changing Driving Voltage

Microswitch with Mixed Piezoelectric and Electrostatic Actuation

Stability Improvement of Surface Acoustic Wave Motor using Chemically Reduced Lithium Niobate

Ultra-Compact, Zero-Power Latching Linear Motor with Integrated Position Sensor for Portable Electronics

Post-Processing Micromachined Pull-In Accelerometer

In-Situ Pressure Measurements of Encapsulted Gyroscopes

Low-Power, Continuous-Time Sigma-Delta Interface for Micromachined Gyroscopes Employing a Sub-Nyquist-Sampling Technique

Investigation on the Pressure-Dependent Performance of a Surface Micromachined Gyroscope

Impact of Si DRIE on Vibratory MEMS Gyroscope Performance

Sub-μg Ultra-Low-Noise MEMS Accelerometers Based on CMOS-Compatible Piezoelectric AlN Thin Films

In-Plane Nano-G Accelerometer Based on an Optical Resonant Detection System

Anti-Phase Driven Rate Gyroscope with Multi-Degree of Freedom Sense Mode

Diamagnetically Levitated MEMS Accelerometers

Vibrating Beam Accelerometer with Hard Suspension Beams

A Fully Integrated MEMS-Based Convective 3-DOF Gyroscope

A Novel Two-Dimensional Micromachined Accelerometer Based on Thermocapillary Heat Transfer

Surface Micromachinable Accelerometer using Fringe Electrical Field of Penetrating Ferroelectric Substrate and its Characterization

Bio-Microelectronic Information Processing Device Consisting of Natural Neurons on a CMOS Microsystem

Evaluation of SIROF Microelectrodes for Single Neuron Stimulation in Biohybrid Circuits

A Novel Method of Fabricating Convoluted Shaped Electrode Arrays for Neural and Retinal Prosthesis

A Polynorbornene-Based Microelectrode Array for Neural Interfacing

Nano-Grating Force Sensor for Measurement of Neuron Membrane Characteristics Under Growth and Cellular Differentiation

Design and Function Principle of a Large Scale Sensor Array for the Bi-Directional Coupling to Electrogenic Cells

Improved Neuronal Adhesion to the Surface of Electronic Device by Engulfment of Protruding Micro-Nails Fabricated on the Chip Surface

Three-Dimensional Metal Transfer Micromolded Microelectrode Arrays (MEAS) for In-Vitro Brain Slice Recordings

Design and Performance of Aluminum Nitride Piezoelectric Microphones

Ultra Low Tensile Stress Electroplated Nickel Layers: A New Application as Membrane Material for Acoustic Devices

Automated Extraction of Multi-Energy Domain Reduced-Order Models Demonstrated on Capacitive MEMS Microphones

Adaptation for Frequency Focusing and Increased Sensitivity in Biomimetic Flow Sensors using Electrostatic Spring Softening

Ultrasonic Position Measurement using Phased Array Microsensors with Resonant Frequency Variation

Miniature High Sensitivity Ultrasonic Transducers using Epitaxial PZT Thin Films Grown on Epitaxial $Γ-AL_{2}O_{3}/SI$ Substrates for Smart Devices

High Frequency Surface Acoustic Wave Atomizer

Harmonic Operation of Acoustic Transducer for Droplet Ejection Application

A Lateral Field Excited Acoustic Wave Sensor

Novel In-Plane Polarized PZT Film Based Ultrasonic Micro-Acoustic Device

Silicon Cochlear Michrophone "Fishbone" with Complex Filtering and Hilbert Transform Capability for Instantaneous Signal Detection and Analysis

Modeling and Simulation of a Condenser Microphone

Design and Fabrication of the High Directional Ultrasonic Ranging Sensor to Enhance the Spatial Resolution

A High-Stability MEMS Frequency Reference

32 × 32 pH Image Sensors for Real Time Observation of Biochemical Phenomena

A Standing Micro Coil for a High Resolution MRI

Thin Electrowetting Controlled Optical System with Pan/Tilt and Variable Focus Functions

Exceptional Wear Resistance of MEMS Devices Coated with Carbon-Doped Alumina Films

A Micromachined X-Ray Collector for Space Astronomy

Quality Factors and Energy Losses of Single-Crystal Silicon Nanowire Electromechanical Resonators

Nickel-Tin Transient Liquid Phase (TLP) Wafer Bonding for MEMS Vacuum Packaging

SOI-CMOS Platform for Monolithically Integrating High-Voltage Driver Circuits with Bulk-Micromachined Actuators

Three Dimensional Perfusion Culture of Encapsulated Embryonic Stem Cells in Microfluidic Chip

A Novel Fluid Suction Tool for Capsular Endoscope

Artificial Capillary Network Chip for in Vitro 3D Tissue Culture

Simultaneous Dielectrophoretic Separation and Impedimetric Detection of Microbeads using Interdigitated Electrodes Array

Accumulation of Uniform Aqueous Plugs in a Microchannel with Porous Sidewalls for Generating Arrayed Nanomembranes of Amphiphilic Molecules

AC Electroosmotic Generated In-Plane Microvortices for Stationary or Continuous Fluid Mixing

Micro-Structured Surface Ratchets for Droplet Transport

MEMS-Based Uncooled Infrared Focal Plane Arrays

A 16-Cell 80dB Dynamic-Range Auto-Ranging Read-Out Array for Uncooled IR Micro-Bolometers

A New Single Photon Avalanche Diode in CMOS High-Voltage Technology

MEMS Temperature Characterization by CdSe Quantum Dots

Micro Multi-Probes Electrode Array for the Recording Retinal Neuron Signal

The Effect of Biodegradable Drug Release Coatings on the Electrical Characteristics of Neural Electrodes

Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs

High-Density Flexible Parylene-Based Multielectrode Arrays for Retinal and Spinal Cord Stimulation

A Fully Functional, Packaged Active Microscaffold System with Fluid Perfusion and Electrical Stimulation/Recording Functionalities for 3-D Neuronal Culture Studies

A Depletion Layer Actuator

Design and Testing of a Field-Chopping Electric Field Sensor using Thermal Actuators with Mechanically Amplified Response

Mechanically Bi-Stable In-Plane Switch with Dual-Stiffness Actuators

Cardiomyocytes Self-Powered Polymer Microrobot

A Portable Pneumatically-Actuated Refreshable Braille Cell

A Nanowire Sensor for Aromatic Nitro Compounds using Charge Transfer Interaction

MEMS-Based Air Quality Sensor

Whole-Cell Conductometric Biosensor for Determination Heavy-Metals in Water

Analysis of Heavy Metal Ions in Real Samples using a Concentrator Device with a Super-Hydrophobic Surface

Cellulose-Based Optical Sensor for the Selective and Quantitative Detection of Mercury Ions in Aqueous Media

MEMS Tunable Dual-Wavelength Laser with Large Tuning Range

Real Pivot Mechanism of Rotary Comb-Drive Actuators for MEMS Continuously Tunable Lasers

MEMS Tunable Coupled-Cavity Laser

Low Loss Tunable Optical Filter using Silicon Photonic Band Gap Mirrors

An Integrated Photonic MEMS Switch System with Fast Switching Speed and Low Power Demand

Glove Type of Wearable Tactile Sensor Produced by Artificial Hollow Fiber

3-Axes Tactile Sensor with Tunable Sensing Range

Fabrication and Characterization of Silicon-Polymer Beam Structures for Cantilever-Type Tactile Sensors

A Robust and Sensitive Silicon-MEMS Tactile-Imager with Scratch Resistant Surface and Over-Range Protection

Cantilever-Based Tactile Sensor with Improved Sensitivity for Dimensional Metrology of Deep Narrow Drillings

Benefits of MEMS Based Seismic Accelerometers for Oil Exploration

A Novel Elastomer-Based Magnetoresistive Accelerometer

A Differential Capacitive Three-Axis SOI Accelerometer using Vertical Comb Electrodes

A Novel Out-of-Plane Accelerometer with Fully-Differential Sensing Circuit and Sub-Micron Gap

An Integrated Micro-Analytical System for Complex Vapor Mixtures

A Fully-Integrated MEMS Preconcentrator for Rapid Gas Sampling

A Miniaturized Ion Mobility Spectrometer for Detection of Hazardous Compounds in Air

A Micropump-Driven High-Speed MEMS Gas Chromatography System

A Novel Tilting Micromirror with a Triangular Waveform Resonance Response and an Adjustable Resonance Frequency for Raster Scanning Applications

High Reflectivity Broadband Photonic Crystal Mirror MEMS Scanner

NiFe Plated Biaxial Magnetostatic MEMS Scanner

Novel Spatial Light Phase Modulator with Bidirectional Tilt-Pistonmicromirror Array

A Thermo-Pneumatically Actuated Tip-Tilt-Piston Mirror

Proposition of Atomic Force Probes Based on Silicon Ring-Resonators

Development of Self-Vibration and -Detection AFM Probe by using Quartz Tuning Fork

Highly Sensitive Cantilevers, with and without Magnetic Tip, for Magnetic Resonance Force Microscopy

Nanotopography Imaging using a Heated Microcantilever in Tapping Mode

Design and Test of a Novel Higher Harmonic Imaging AFM Probe with a Dedicated Second Cantilever for Harmonic Amplification

"CNT-Polymer" Composite-Film as a Material for Microactuators

Carbon Nanotube Micro-Electrode Array

Evaluation of Piezoresistive Effects for Carbon Nanowire using MEMS Actuators

Nanoscale Straining of Individual Carbon Nanotubes by Micromachined Transducers

Piezoresistance of Single-Walled Carbon Nanotubes

Optofluidic Maskless Lithography System

Continuous Production of Spherical Microcapsules with Nano-Pores and Use as a Potential Encapsulant

Surface Wettability in Terms of Prominence and Depression of Diverse Microstructure and Their Sizes

Micro Proximity Electron Source with Apertured Electron Window for Nanolithography in Atmosphere

A Method to Form Bonded Micromagnets Embedded in Silicon

Sensor Networks for Integration into Textile-Reinforced Composites

Nanoscale Al-Al and Cu-Cu Contacts

A Biaxially Stretchable Interconnect with Liquid Alloy Joints on Flexible Substrate

Double-Cantilever Infrared Detector: Fabrication, Curvature Control and Demonstration of Thermal Detection

Fabrication and Characterization of High Aspect Ratio Silicon Plate Springs with High Out-of-Plane Stiffness

Stacked SiO2/Si Nanonail Array Fabricated by Spacer Technology for Biomedical Applications

Fabrication of Vertical Electrodes on Channel Sidewall for Picoliter Liquid Measurement

Polymer Microchip for Electrophoresis-Mass Spectrometry Fabricated by Hot Embossing and Low Temperature Direct Bonding

Fabrication of Three-Dimensional Nano-Patterns by Inclined Nanoimprinting Lithography

High Performance Microcooler Fabricated by Multiple Stacking of Electroplated Metal Patterns

Improved Hydrophobicity of Vapor Coated Chlorosilane Self Assembled Monolayers using Evaporative Drying of Solvent and Annealing

Mechanical Properties of Silicon-Based Membrane Windows Applied for a Miniature Electron Beam Radiation System

3D Metal Microstructure Fabrication using a Molten Metal DoD Inkjet System

Self-Aligned Stylus with High Sphericity for Micro Coordinate Measurement

Conductive Polymer Patternd Media for Scanning Multiprobe Data Storage

Development of Scanning Probe Parallel Nanowriting System with Electron Beam Resist

Characterization of the Micro Contact Resistance using a Novel On-Chip Apparatus

Investigation of Anti-Stiction Coating for MEMS Switch using Atomic Force Microscope

Material Properties Measurement and Numerical Simulation for Characterization of Ultra-Low-Power Consumption Hotplates

Simulation, Design and Test of a Novel Planar RF Micro Ion Trap

Analysis and Experimental Validation of Electromechanical Buckling

Modularmultifunctional Siliconmicrosystems for Spacecraft Applications

Horizontal Hall Devices: A Lumped-Circuit Model for EDA Simulators

Modeling and Test of Nanostructure Fabricated on 160 nm Thin SOI Wafer for In-Ic Integration

MEMS Electrometer System Simulation using a Time-Domain Variable Capacitor Model

Sliding Contact Micro-Bearing for Nano-Precision Sensing and Positioning

Parallel Plate Capacitive Detection of Large Amplitude Motion in MEMS

Prediction and Validation of Chaotic Behavior in an Electrostatically Actuated Microelectromechanical Oscillator

An Atomic Level Simulation System for Silicon Anisotropic Etching Processes Handling Complex Cases: Accuracy, Efficiency and Experimental Verification

Smart Flapping Wings with a PVDF Sensor to Modify Aerodynamic Performance of a Micro UAV

Integration of MOSFET Transistors in MEMS Resonators for Improved Output Detection

A Novel Miniaturized Electromagnetically Excited Vibrating Membrane Rheometer

Novel Magnetic-Acoustic Face Shear Mode Resonators for Liquid Property Sensing

An Experimental Study of Nonlinear Limits in High-Q Silicon Vibrating Micro-and Nanomechanical Sensors

Adjustable Force Coupled Sensor-Actuator System for Low Frequency Resonant Vibration Detection

Application of a Lateral Field Excited Acoustic Wave Device as a New Sensor Principle in Biointerface Analysis

Equivalent-Circuit Model for CMOS-Based Resonant Cantilever Biosensors

Liquid-Phase Biochemical Sensing with Disk-Type Resonant Microsensor

Resonance Induced Impedance Sensing of Human Blood Cells

Exploitation of Nonlinear Effects for Enhancement of the Sensing Performance of Resonant Sensors

Microprobe Integrated with Single-Electron Transistor for Magnetic Resonance Force Microscopy

12.9MHz Lame-Mode Differential SOI Bulk Resonators

MEMS-Based Enthalpy Arrays

Chip-Based Scanning Nano-Calorimeter for Protein Stability Analysis in Biosensor Membranes

High Efficiency Sample Transfer Between IEF and SDS-PAGE Separations on a Miniaturized Proteomics Chip

Hydrophoresis: A New -Phoretic Method for High-Resolution Particle Separation

A High-Throughput SU-8Microfluidic Magnetic Bead Separator

Focusing and Continuous Separation of Cells in a Microfluidic Device using Lateral Dielectrophoresis

A Total Internal Reflection (TIR)-Based Chip for Ultra-Sensitive Fluorescent Sensing

ng/ml-Level Alpha-Fetoprotein Immuno-Detection with Torsion-Mode Cantilever Sensors for Early-Stage Heptocellular Carcinoma Diagnosis

High Sensitivity Micropillar Electrosprayionization Chip Fabricated of Silicon

Simultaneous Multipoint Measurement of Cellular Network by Isolated Micro Channel Array with PT-Black Electrodes

Fabrication of Cell-Encapsulated Microfiber using Microfluidic Channel

A Passive Microfluidic Valve using Superhydrophobic/Hydrophilic Nanostructures for Lab-on-A-Chip (LOC) Systems

An Integrated Electronic Meniscus Sensor for Measurement of Evaporative Flow

3D Droplet Actuation in Digital Microfluidics Devices

Uniform Nanoliter-Sized Droplet Deposition using Fluid Motion in Ratcheted Micro-Channels

Mixing Immiscible Fluids in a Microchannel Through Surface Modifications

Novel Hybrid Material Formicrofluidic Devices

A High Throughput Microfluidic Bioparticle Sensor

Overcoming the Diffusion Barrier: Ultra-Fast Micro-Scale Mixing Via Ferrofluids

The Influence of Physical Cell Parameters on Projection Cytometer Measurements

Bidirectional Field-Flow Particle Separation Method in a Dielectrophoretic Chipwith 3D Electrodes

A Microsystem Chip for the Manipulation of Bio-Particles Via AC Electrokinetics Array

Analysis of Micrometer Sample Flows in a Non Coaxial Sheath Flow Device

Thermal Characterization of a Microfluidic Cell using the 3ω Method

Effects of Microchannel Cross-Section and Applied Electric Field on Electroosmotic Mobility

"Smart" Microfluidic Preconcentration of Specific Biomolecules

Rapid Detection of Waterborne Protozoa in Environmental Samples with a Filter-Based Biochip

A Centrifugation-Enhanced High-Efficiency Micro-Filter with Spiral Channel

The Multi Vortexes Generated Inside a Micro Droplet and Used to Enhance the Droplet Mixing Efficiency

Compressive Cell Stimulation using PDMS Membrane Deflection in a Microfluidic Device

Direct Liquid Manipulation by Parallel Micro Syringe System for High Controllability with Pico-Liter Scale

Charge Transfer Type pH Sensor with Super High Sensitivity

Protein Assemblies on Gold using Polyelectrolytes for the Construction of Analytical Signal Chains

Electrical Detection of Nucleic Acids using Target-Guided Formation of Conducting Polymer Nanowires in Nanogaps

Nanocrystalline Diamond-Based Field-Effect Capacitive pH Sensor

FET Transduction of Electric Dipole Changes in Organic Layers

Multibiosensor on the Basis of Yeast Cells for Detection of Glucose and Sucrose in Aqueous Solutions

EIS-Capacitor-Based LC Wireless Chemical Sensors

Amperometric Oxygen Sensor Array with Novel Chronoamperometric Protocols for Hypoxic Tumor Cell Cultures

Embedded MEMS-Based Concentration Sensor for Improved Active Fuel Cell Performance

Laser-Terahertz Emission Readout of Chemical Sensors

Direct Detection of Nucleic Acids by Tagging Phosphates on Their Backbones with Conductive Nanoparticles

Highly Ordered Nanostructures for Ultra-Sensitive SERS

Improved and Accelerated Analytical Calculation Algorithm for Multi-Wire Coils to Power Wireless Sensor Systems

A Low Power Radio Telemetry Achieving Very High Data Rates at Biocompatible Frequencies

Pressure Sensitivity Evaluation of Passive SAW Microsensor Integrated with Pressure-Temperature and ID Tag on 41°-YX LiNbO3

Bimetallic Thermal Radiation Microsensor with Integrated Dipole Antenna

An Implantable Active Microport Based on a Self-Priming High-Performance Two-Stage Micropump

Micro-Ablation of Skin by Arc-Discharge Jet Ejection for Transdermal Drug Delivery

6-Stage Cascade Mode Magnetophoretic Microseparator for Human Blood Cells

Development and Use of a Micro Optical Blood Flow Sensor Based on Systemin Package (SIP) Technology that Fuses Optical MEMS and Integrated Circuit to Detect Avian Influenza

Micro-Dissecting Dual-Probe Testicular Tubule Assay

In Situ Monitoring Drug Effects on Cancer Cell at "Few Cells" Level

Blood Plasma Separation Device using Capillary Phenomenon

On - Chip Multi Wavelength Detection Sensor for Real Time Monitoring of Fluorescence and Opacity

A Nucleic Acid Biosensor Based on Catalyzed Formation of Polyaniline

Synthesis of Electrochemical Probes for Nucleic Acid Detection

Low Concentrated DNA Detection by SGFET

Printable DNA Sensor using Organic Transistors

Voltammetric Analysis of DNA Films Immobilized on Gold Film Electrodes Carrying Single Base Pair Mismatches

Application of a Bio-QCM to Study Carbohydrates Self-Interaction in Presence of Calcium

First Characterization of a Biosensor for Large DNA Molecules using Quartz Crystal Microbalance and Impedance Spectroscopy

Silicon Nanowire Arrays for Ultrasensitive Label-Free Detection of DNA

A New Self-Compensated Thermocycler for Polymerase Chain Reaction

New Column Designs for MicroGC

A One - Chip Solution of a Mass Spectrometer

Increase of the Selectivity of Sensor Arrays Through Consumption Effects of Metal Oxide Sensors

Integrated Interface Circuit with Multiplexed Input and Digital Output for a 5x5 SnO2 Gas-Sensor Matrix

A Gas Density Detector Utilizing Uranium Doped Scintillating Ceramic Microchannels

An Uncalibrated Wide-Range Single-Supply Integrable Front-End for Resistance and Capacitance Estimation

Alumina MEMS Platform for Impulse Semiconductor and IR Optic Gas Sensors

Capacitive Humidity Sensors on Flexible RFID Labels

Hydrogen Sensing Characteristics of a Pd/GaAs Semiconductor Transistor-Type Sensor

A New PT-Oxide-InALP-Based Schottky Diode Hydrogen Sensor

Simultaneous Formation of Through Wafer Electrical Interconnects and Highly Dense & Uniform Nickel Tips for Silicon-Cantilever Probe-Cards

Wirebonding Characterization and Optimization on Thick Filmsu-8 MEMS Structures and Actuators

Fabrication of Feedthrough Atom Trapping Chips for Atomic Optics

Via-Free Interconnection in Quasi-Hermetic Wafer-Level Packaging for RF-MEMS Applications and 3D Integration

A Reusable In-Plane Polymer Integrated Microfluidic Interconnect

Dry Filmpackage for Systemin Packagemolding Process

Low Temperature A-SiC/Si Direct Bonding Technology for MEMS/NEMS

Fully Dry 2D and 3D Self-Assembly with Interlocking Pin Fasteners

Realtime 3D Stress Measurement in Curing Epoxy Packaging

CMOS-Compatible Wafer-Level Microdevice-Distribution Technology

MEMS Wafer-Level Packaging with Conductive Vias and Wafer Bonding

Polydimethylsiloxane (PDMS) Bonding Strength Characterization by a Line Force Model in Blister Tests

A Novel Zero-Level Packaging using BCB Adhesive Bonding and Glass Wet-Etching for Millimeter-Wave Applications

Wafer Bonding with Nanoprecision Alignment for Micro/Nano Systems

A Novel Low-Temperature Microcap Packaging using SU-8 Bonding

Thru-Wafer Interconnect for SOI-MEMS 3D Wafer-Level Hermetic Packaging

Fabrication and Characterization of RF MEMS Package Based on LTCC Lid Substrate and Gold-Tin Eutectic Bonding

Microstructured Devices for Computer Screen Photo Assisted Optical Fingerprinting of High Density Response Patterns

Detection of Single Biological Cells using a DVD Pickup Head

High Sensitivity On-Chip Fluorescence Detection Based on Cross-Polarization and Thin-Film Organic Photodetectors

Via-in-Pixel Design of Truly 2D Extendable Photodiode Detector for Medical CT Imaging

Ultra High Contrast $GxL^{TM}$ Device for Laser Projector

Characterization of Latching 2×2 Optical Switch with Movable Polymer Waveguide

Novel Absorption Photometry Microchip with No Reference Solution

Novel Micro Lens with Tunable Astigmatism

Driving of Micromirror and Simultaneous Detection of Rotation Angle using Integrated Piezoresistive Sensor

A Hybrid-Assembled MEMS Fabry-Perot Wavelength Tunable Filter

Differential Mach-Zehnder Interferometer for Simultaneously Determining Size and Refractive Index of Living Cells

Genetic Extended-Fiber Network (GEN) Stretched Over Microbridges Fabricated by Single-Mask Inclined UV Lithography

Experimental Study of a Novel Silicon Carbide MEMS Ignition Device

Bubble Driven Arrayed Actuator Device for a Tactile Display

A Single-Layer Step-Bridge for Out-Of-Plane Thermal Actuator

On-Chip Array of Thermoelectric Peltier Microcoolers

Analysis of Valveless Piezoelectric Micropump using Electrical Equivalent Circuit Model

A Dram-Like Mechanical Non-Volatile Memory

Robust Trimorph Bulk SMA Microactuators for Batch Manufacturing and Integration

Ti-Ni SMA Film-Actuated 2-D Multi-Probe Array for Scanning Probe Nano-Lithography on a Wide Area

A Bi-Stable Latchable PDMS Valve Employing Low Melting Temperature Metal Alloys

MEMS Applications in Hard Disk Drives

A Micro Diffuser/Nozzle Pump with Fins on the Sidewall

Biochemical-Powered Pump with an Asymmetric Enzyme Membrane

A Digital Push-Pull Liquid Pump for Tunable Liquid-Filled Lens

Performance Evaluations of Prototype of Tube-Type Micropump using Heart Muscle Cells Actuator

Parallel Transportation of Droplets in a Multilayer Device by MEWOD

High-Accuracy Digital-To-Analog Actuators using Load Spring Compensating Fabrication Errors

A Virtual Impactor for Hydrodynamic Particle Classification

A Magnetic Repulsive Force MEMS Actuator

Rotational Brownian Motion of Magnetically Clamped Silicon Nanoneedle: Towards Nano-Motors Fueled by Brownian Motion

Reinforced Pressure Sensor for Marine Environment

High Piezoresistive Organic Film for Plastic Pressure Sensors

Extreme Narrow Gap Surface Micromachined Pirani Pressure Sensor

Fabrication and Characterization of the Piezoelectric Microcantilever Integrated with PZT Thin-Film Microforce Sensor and Actuator

Transparent SU-8 Three-Axis Micro Strain Gauge Force Sensing Pillar Arrays for Biological Applications

Investigating the Role of Orientation Angle on Gecko Setae Adhesion using a Dual-Axis Mems Force Sensor

Compact Multilayer Piezoresistive Gauge for In-Plane Strain Measurment in Liquids

Thermal Characterization of Porous Silicon Micro-Hotplates using IR Thermography

Flexible PCB Vertical Thermopile IR Sensor

Miniaturised Flexible Temperature Sensor

The Effect of Substrate Doping on the Behaviour of a CMOS Electrothermal Frequency-Locked-Loop

Flexible Temperature Sensor Array using Electro-Resistive Polymer Forhumanoid Artificial Skin

Towards Enhanced Detection of Chemical Agents: Design and Development of a Microfabricated Preconcentrator

A Photo- Switchable Signal Chain for Superoxide Detection using a CDSE/ZNS- Quantum Dot Modified Gold Electrode

A Nanobiosensor Fabricated by Nanoimprinting Technology

Miniature Tunneloxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminecscence Studies

Microfabricated Gate-Modulated Electrochemical Ion Spectroscopy Sensor

SAMs and Protein Adsorption Studies for the Calibration of Miniaturized Quartz Crystal Microbalance Arrays

An Out-of-Plane MEMS Quadrupole for a Portable Mass Spectrometer

Hydrogel-Based Sensor for a Rheochemical Characterization of Solutions

On the Possibility of a Graphene Based Chemical Sensor

Gas Flowin Nano-Channels: Thermal Transpirationmodelswith Application to a Si-Micromachinedknudsen Pump

Aeromems Wall Hot-Wire Sensor Arrays on Polyimide with Through Foil Vias and Bottom Side Electrical Contacts

High Performance Sensor for Angular Resolved Flow Measurement

Biocompatible Flow Sensor with Integrated Solvent Concentration Measurement

Transient Analysis of an Injection Quantity Sensor for Automotive Applications

Characteristics of On-Wall In-Tube Flexible Thermal Flow Sensor at Wrap Pipe Condition

Contactless Liquid Level Sensing using Wave Damping Phenomena in Free-Space

A Displacement Sensor Based on Directional Resonant Photodetector

Displacement Sensing by Field Emission with Nanometer Resolution

Experimental Characterization of Micromachined Electromagnetic Probes using Scanning Hall Probe Microscopy

Characterisation of Magnetic Wires for Fluxgate Cores

CMOS Compatible Out-of-Plane & In-Plane Magnetometers

Geometric Optimization and Microstructuring of Magnetic Concentrators for a Resonant Magnetic Sensor

Robust Susceptibility-Matched NMR Probes for Compensation of Gradient Field Imperfections in Magnetic Resonance Imaging

Evaluation of Magnetic Beads Agitation Performance Operated by Multi-Layered Flat Coils

Industrialisation of Gas Sensors for Comfort, Security and Wellness

MEMS Based Paramagnetic Oxygen Measurement

Enabling MEMS Chemical Microsensor Arrays for Trace Analyte Detection

Highly Integrated Wafer Level Packaged MOX Gas Sensors

A New Fabrication Method of Ultra-Small Laser Scanning Module

Air-Spaced Cylindricalprisms for Fast Thermo-Optic Switching

2D Cantilever Array SPM using Optical Interference

Variable Nano-Grating for Tunable Filters

Multi-Cantilever-Driven Rotational Micrograting for MOEMS Spectrometer

A Micromachined Vapor-Jet Vacuum Pump

Metallic High-Pressure Microfluidic Pump with Active Valves

Micro Fabrication of SiC Mesoscale Lean Direct Injector Array: Toward Active Combustion Control

Electrokinetically Pumped Liquid Propellant Microthrusters for Orbital Station Keeping

Explosive Micro-Bubble Actuator

6Mhz Bulk-Mode Resonator with Q Values Exceeding One Million

On-Chip High Quality Factor CMOS-MEMS Silicon-Fin Resonators

Quality Factor Boosting via Mechanically-Coupled Arraying

Novel Temperature Compensation Scheme Formicroresonators Based on Controlled Stiffnessmodulation

Effect of Electrode Configuration on the Frequency and Quality Factor Repeatability of RF Micromechanical Disk Resonators

Enhanced Discrimination of Complex Odours Based upon Spatio-Temporalsignals from a Micro-Mucosa

Study of Odor Classification in Dynamically Changing Concentration using QCM Sensor Array and Short-Time Fourier Transform

Novelconvolution Based Signal Processing Techniques for a Simplified Artificial Olfactory Mucosa

Characterization of Smelling Contaminations on Textiles using a Gradient Micro Array as an Electronic Nose

A Method for Online Measurement of Odour with a Chemosensor System

Photonic MEMS: From Laser Physics to Cell Biology

A Microfluidic Oxygenator for Biological Cell Culture

A Cmos Microsystem Combining Magnetic Actuation and In-Situ Optical Detection of Microparticles

Microanalysis System Based on Electrochemiluminescence with Automatic Mixing and pH-Regulation Functions

Scanning Electron Microscopy for Vacuum Quality Factor Measurement of Small-Size Mechanical Resonators

In-Situ TEM Observation of Crystal-Facet-Dependent Self-Rearranging Gold Atoms Under Tensile Stress Controlled by MEMS Nanoprobe Positioner

Multi-Probe with Metallic Tips for Ferroelectric Recording Probe Storage

Self-Sensing Quartz-Crystal Cantilever for Nanometric Sensing

MEMS-Based Probe Array for Wafer Level LSI Testing Transferred onto Low CTE LTCC Substrate by Au/Sn Eutectic Bonding

Development and Commercialization of MEMS in Taiwan a Bumpy Exciting Experience

Convective Gas Gyroscope Based on Thermo-Resistive Effect in Si P-N Junction

Precise MEMS Gyroscope with Ladder Structure

Microgyroscope Control System using a High-Order Band-Pass Continuous-Time Sigma-Delta Modulator

System Design and Analysis Concept of a Highly Adaptable NDIR Sensor for Gas Analysis

Fabrication and Characterization of a Hydrogen Sensor Based on Palladium Nanowires

Chiral Discrimination Performance of a Monolithic CMOS Gas Sensor Microsystem

Ball Surface Acoustic Wave Hydrogen Sensor with Widest Sensing Range and Fast Response

NO2 Gas Sensors Based on Individual Suspended Single-Walled Carbon Nanotubes

Pneumatically-Actuated Tunable Microlens for Endoscopic Optical Coherence Tomography

On-Chip Scanning Confocal Microscope with 3D MEMS Scanner and VCSEL Feedback Detection

Design and Fabrication of Micromachined Silicon Based Mid Infrared Multilenses for Gas Sensing Applications

Modify 2D Gradient-Electrostatic-Forces to Manipulate Micro-Aspherical Lens for Small Form Factor DVD Pickup Head

Optical Characterization of Repositionable Liquid Micro-Lenses

Investigation of Giant-Magneto-Impedance (GMI) Effect and Magnetic Hysteresis in Microfabricated Permalloy/Copper Device

Performances of a Newly High Sensitive Trilayer F/CU/F GMI Sensor

Microfluxgate Sensors for High Frequency and Low Power Applications

Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

Circular Hall Transducer for Angular Position Sensing

A Silicon Carbide Capacitive Pressure Sensor for High Temperature and Harsh Environment Applications

A Low-Cost and Highly Integrated Fiber Optical Pressure Sensor System

Optically Detected, Framed Silicon Cantilever for High Precision Acoustic Sensing

Development of a Capacitive Ultrasonic Sensor Having Parylene Diaphragm

Small Silicon Condenser Microphone Improved with a Backchamber with Concave Lateral Sides

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)

Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

Smart Individual Switch Addressing of 5 × 5 and 20 × 20 MEMS Double-Switch Arrays

Content Provider	IEEE Xplore Digital Library
Author	Braun, S. Oberhammer, J. Stemme, G.
Copyright Year	2007
Description	Author affiliation: KTH - R. Inst. of Technol., Stockholm (Braun, S.; Oberhammer, J.; Stemme, G.)
Abstract	This paper presents a smart row/column addressing scheme for large MEMS microswitch arrays, utilizing the pull-in / pull-out hysteresis of their electrostatic actuators to efficiently reduce the number of control lines. Single-chip 20 times 20 double-switch switch arrays with individually programmable 400 switch elements have been fabricated and the smart addressing scheme was successfully evaluated. The reproducibility of the actuation voltages within the array is very important for this addressing scheme and therefore the influence of effects such as isolation layer charging on the pull-in voltages has also been investigated.
Starting Page	153
Ending Page	156
File Size	512789
Page Count	4
File Format	PDF
ISBN	1424408415
DOI	10.1109/SENSOR.2007.4300094
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-10
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Switches Micromechanical devices Electrostatic actuators Microswitches Voltage Electrodes Biomembranes Sensor arrays Hysteresis Solid state circuits electrostatic actuators MEMS switches switch arrays individual addressing
Content Type	Text
Resource Type	Article

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