NDLI: Proposition of Atomic Force Probes Based on Silicon Ring-Resonators

Content Provider	IEEE Xplore Digital Library
Author	Faucher, M. Walter, B. Rollier, A.-S. Seguini, K. Legrand, B. Couturier, G. Aime, J.-P. Bernard, C. Boisgard, R. Buchaillot, L.
Copyright Year	2007
Description	Author affiliation: Inst. d'Electron. de Microelectronique et de Nanotechnologie, Lille (Faucher, M.; Walter, B.; Rollier, A.-S.; Seguini, K.; Legrand, B.)
Abstract	We present the first implementation of an atomic force microscope (AFM) probe using bulk- mode silicon resonators. This probe is developed in order to perform force or dissipation spectroscopy and to enable AFM imaging in liquids thanks to reduced dissipation effects. We show that balanced tip integration allows the probe to operate in a lateral mode derived from elliptical bulk modes of circular plates. A proof-of-concept technological realization opens up the way to first AFM experiments using this resonator around 7 MHz frequencies.
Starting Page	1529
Ending Page	1532
File Size	897699
Page Count	4
File Format	PDF
ISBN	1424408415
DOI	10.1109/SENSOR.2007.4300436
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-10
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Probes Silicon Atomic force microscopy Optical resonators Q factor Force sensors Hydrodynamics Resonant frequency Oscillators Atomic measurements Force sensing Resonators Atomic Force Microscopy
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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