NDLI: In-Plane Nano-G Accelerometer Based on an Optical Resonant Detection System

Content Provider	IEEE Xplore Digital Library
Author	Krishnamoorthy, U. Carr, D.W. Bogart, G.R. Baker, M.S. Olsson, R.H.
Copyright Year	2007
Description	Author affiliation: Sandia Nat. Labs., Albuquerque (Krishnamoorthy, U.)
Abstract	We have successfully demonstrated a series of results that push the limits of optical sensing, acceleration sensing and lithography. We previously built some of the most sensitive displacement sensors with displacement sensitivities as low as 12 fin/radicHz at 1 kHz. Using reference detection circuitry in conjunction with correlated double sampling methods, we have lowered the 1/f noise floor to 10 milli-Hz, hence improving the detection limit at low frequencies (10 milli-Hz) from 37 pm/radicHz to 50 fm/radicHz i.e. by 57.3 dB. We have developed the capability to convert these highly sensitive displacement sensors to highly sensitive acceleration sensors through innovative low-stress mass addition and direct mass integration processes. We have built accelerometers with resonant frequencies as low as 43 Hz and thermal noise floors as low as 10 nG/radicHz. We have pushed the limits of shaker table experiments to verify direct acceleration measurements as low as 10 muG/radicHz.
Starting Page	1195
Ending Page	1198
File Size	744138
Page Count	4
File Format	PDF
ISBN	1424408415
DOI	10.1109/SENSOR.2007.4300350
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-10
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accelerometers Resonance Optical detectors Optical sensors Acceleration Lithography Sampling methods Circuit noise Low-frequency noise Optical noise low-G accelerations Nanograting optical accelerometer optical resonant detection in-plane accelerometer optical sensing
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in