NDLI: Investigation on the compositionally graded Hf/sub x/Al/sub y/O/sub z/ films for TiN based DRAM capacitor

Content Provider	IEEE Xplore Digital Library
Author	Deok-Sin Kil Kwon Hong Seung-Jin Yeom Han-Sang Song Ki-Seon Park Jae-Sung Roh Noh-Jung Kwak Hyun-Cheol Sohn Jin-Woong Kim Sung-Wook Park
Copyright Year	2005
Description	Author affiliation: R & D Div., Hynix Semicond. Inc., Kyoungki-Do, South Korea (Deok-Sin Kil; Kwon Hong; Seung-Jin Yeom; Han-Sang Song; Ki-Seon Park; Jae-Sung Roh; Noh-Jung Kwak; Hyun-Cheol Sohn; Jin-Woong Kim; Sung-Wook Park)
Abstract	New concept of capacitor dielectric thin film was successfully demonstrated through graded Hf/sub x/Al/sub y/O/sub z/ dielectric thin film accompanied by post ozone annealing for the application to DRAM capacitor. MIM capacitor with graded Hf/sub x/Al/sub y/O/sub z/ dielectric films showed drastically reduced leakage current and highly improved breakdown voltage by 0.45-0.75V maintaining the same EOT value. In the case of graded film with Hf/Al=1.5/1, EOT showed very small value of 12.3/spl Aring/ and leakage current could be maintained as low as 1E/sup -16/A/cell at +1.0V.
Starting Page	371
Ending Page	374
File Size	1055388
Page Count	4
File Format	PDF
ISBN	0780392035
DOI	10.1109/ESSDER.2005.1546662
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-09-16
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Tin Random access memory Dielectric thin films Temperature Leakage current MIM capacitors Sputtering Hafnium oxide Electrodes Semiconductor films
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in