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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Hu, C. |
| Copyright Year | 1996 |
| Description | Author affiliation: Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA (Hu, C.) |
| Abstract | In the past five years, impressive progress has been made in SOI materials, device and process demonstrations, and product research, yet SOI IC technology remains a promise more than a reality. An important reason is that the rate of bulk technology scaling, in terms of gate length, gate oxide thickness, threshold voltage (V/sub t/), and performance has exceeded earlier expectations (Hu, 1995). In an environment of rapidly advancing bulk technology, it was difficult to overcome the concern over the known and unknown risks of adopting SOI technology, as it was not known how the situation might change with future scaling. This paper attempts to highlight some considerations in three phases of device scaling-when bulk device scaling may proceed rapidly, slowly, and with extreme difficulty. |
| Sponsorship | IEEE Electron Devices Soc |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 367074 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780345002 |
| ISSN | 1078621X |
| DOI | 10.1109/SOI.1998.723043 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1998-10-05 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Investments Capacitance MOSFETs Voltage Design optimization Circuit synthesis Costs Integrated circuit interconnections Degradation Circuit optimization |
| Content Type | Text |
| Resource Type | Article |
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