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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Pike, W.T. Delahunty, A.K. Mukherjee, A. Guangbin Dou Huafeng Liu Calcutt, S. Standley, I.M. |
| Copyright Year | 2014 |
| Description | Author affiliation: Kinemetrics Inc., Pasadena, CA, USA (Standley, I.M.) || Dept. of Electr. & Electron. Eng., Imperial Coll. London, London, UK (Pike, W.T.; Delahunty, A.K.; Mukherjee, A.; Guangbin Dou; Huafeng Liu) || Dept. of Phys., Univ. of Oxford, Oxford, UK (Calcutt, S.) |
| Abstract | We demonstrate a microseismometer with a 2ng/rtHz noise floor capable of autonomous operation over a wide range of tilts. This represents the highest performance yet achieved by a silicon-based vibration sensor. The microseismometer builds on previous development of a short-period seismometer for NASA's 2016 InSight mission to Mars. The deep-reactive-ion-etched sensor element is unique in that it uses a spring-mass system with a proof mass that moves laterally. This minimizes the damping of the spring mass systems without the need for vacuum encapsulation. The proof-mass position is sensed by a periodic linear capacitive array transducer allowing highly sensitive position detection combined with feedback control at multiple null points. Operation at any of these points enables the sensor to function over a large tilt range without compromising the noise performance. As well as the capacitive sensing elements, the proof mass has planar coils on the surface to electromagnetic actuator when placed in a static magnetic field. The MEMS sensor element is connected to an electronics feedback circuit similar to those used in broad-band seismometers allowing the sensor to act as a velocity output force balance transducer. |
| Starting Page | 1599 |
| Ending Page | 1602 |
| File Size | 1165939 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479901623 |
| DOI | 10.1109/ICSENS.2014.6985324 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2014-11-02 |
| Publisher Place | Spain |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Noise Transducers Suspensions Electrodes Silicon Strips Sensors seismometer acceleromter DRIE capacitive transducer |
| Content Type | Text |
| Resource Type | Article |
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