NDLI: A self-levelling nano-g silicon seismometer

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A self-levelling nano-g silicon seismometer

Content Provider	Semantic Scholar
Author	Pike, William Delahunty, A. K. Mukherjee, Aniruddha Dou, Guangbin Liu, Huafeng Calcutt, Simon B. Standley, Ian M.
Copyright Year	2014
Abstract	We demonstrate a microseismometer with a 2ng/rtHz noise floor capable of autonomous operation over a wide range of tilts. This represents the highest performance yet achieved by a silicon-based vibration sensor. The microseismometer builds on previous development of a short-period seismometer for NASA's 2016 InSight mission to Mars. The deep-reactive-ion-etched sensor element is unique in that it uses a spring-mass system with a proof mass that moves laterally. This minimizes the damping of the spring mass systems without the need for vacuum encapsulation. The proof-mass position is sensed by a periodic linear capacitive array transducer allowing highly sensitive position detection combined with feedback control at multiple null points. Operation at any of these points enables the sensor to function over a large tilt range without compromising the noise performance. As well as the capacitive sensing elements, the proof mass has planar coils on the surface to electromagnetic actuator when placed in a static magnetic field. The MEMS sensor element is connected to an electronics feedback circuit similar to those used in broad-band seismometers allowing the sensor to act as a velocity output force balance transducer.
Starting Page	1599
Ending Page	1602
Page Count	4
File Format	PDF HTM / HTML
DOI	10.1109/icsens.2014.6985324
Alternate Webpage(s)	https://workspace.imperial.ac.uk/opticalandsemidev/Public/Publications/seismometer_sensors2014.pdf
Alternate Webpage(s)	https://doi.org/10.1109/icsens.2014.6985324
Journal	IEEE SENSORS 2014 Proceedings
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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