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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Cong Zhang Li Guo Li-Feng Wang Jian-Qiu Huang Qing-An Huang |
| Copyright Year | 2014 |
| Description | Author affiliation: Key Lab. of MEMS, Southeast Univ., Nanjing, China (Cong Zhang; Li Guo; Li-Feng Wang; Jian-Qiu Huang; Qing-An Huang) |
| Abstract | This paper presents an integrated humidity sensor capable of wireless operation through inductive coupling. The sensor chip consists of two counter-rotating planar aluminum coils (0.5μm thick, 100μm width, 50μm space, 6mm outer diameter and 4 turns) separated by a maskless humidity-sensitive polyimide film. The two inductors are capacitively and inductively coupled together to form an inductor-capacitor (LC) electrical resonator, whose resonant frequency changes with humidity. In contrast with previous work, our proposed design eliminates the need of a connection bridge between the inner and outer terminals of the spiral inductor. Additionally, its inner humidity-sensitive overlap parallel-plate capacitor offers higher sensitivity than the passive humidity sensor based on single-layer self-resonant inductor. An equivalent circuit model is investigated for further understanding of the electromagnetic behavior of the sensor. Measurements show a sensitivity of 65kHz/%RH with a centre frequency of about 74MHz. |
| Starting Page | 657 |
| Ending Page | 660 |
| File Size | 2431938 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479901623 |
| DOI | 10.1109/ICSENS.2014.6985084 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2014-11-02 |
| Publisher Place | Spain |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Humidity Inductors Resonant frequency Spirals Wireless sensor networks Sensitivity Humidity measurement planar inductor humidity sensor LC sensor wireless passive |
| Content Type | Text |
| Resource Type | Article |
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