NDLI: Capacitive transducers with curved electrodes

Content Provider	IEEE Xplore Digital Library
Author	McIntosh, R.B. Mauger, P.E. Patterson, S.R.
Copyright Year	2001
Abstract	The design, performance, and potential applications are described for capacitive transducers with curved electrodes. A curved electrode governs the deflection of a compliant electrode under applied stress. A dielectric film on one electrode provides a variable region of fixed electrode spacing. The sensitivity and linear dynamic range of the transducers are higher and wider than devices with parallel electrodes. An electrical advantage is obtained from the permittivity of the dielectric film and a mechanical advantage from its thinness. Transducers have been constructed with silicon diaphragms that bend and polymer membranes that stretch in response to uniform pressure. The silicon sensors measured dynamic pressure changes over a linear range of 125 dB. An 885% change in capacitance was obtained for a sensor with a thin silicon diaphragm. Sensors with polycarbonate membranes demonstrated the ability of a low-cost transducer to measure pressure, fluid flow, displacement, and tilt. An active capacitive bridge circuit was developed to linearly measure capacitance changes up to 1000% and to control electrostatic actuators by force-balanced feedback. Methods and materials to construct microscale transducers are discussed along with the performance limitations of electrostatic actuation.
Sponsorship	IEEE Sensors Council
Starting Page	125
Ending Page	138
Page Count	14
File Size	1435697
File Format	PDF
ISSN	1530437X
Volume Number	6
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2006-02-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Transducers Electrodes Silicon Dielectric films Biomembranes Mechanical sensors Pressure measurement Capacitance Electrostatic measurements Electrostatic actuators ultrasound transducer Capacitive transducer curved electrode electret transducer electrostatic actuator force-balanced feedback null-balanced bridge (NBB)
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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