NDLI: Microwave non-destructive testing of semiconductor wafers in the frequency range 8-12.5 GHz

Content Provider	IEEE Xplore Digital Library
Author	Muhamad, F. Baba, N.H. Awang, Z. Ghodgaonkar, D.K.
Copyright Year	2002
Description	Author affiliation: Fac. of Electr. Eng., Univ. Teknologi MARA, Selangor, Malaysia (Muhamad, F.; Baba, N.H.; Awang, Z.; Ghodgaonkar, D.K.)
Abstract	Microwave non-destructive testing (MNDT) using free-space microwave measurement (FSMM) system involve measurement of reflection (S/sub 11/) and transmission (S/sub 21/) coefficients in free-space. The measurement system consists of a pair of spot-focusing horn lens antenna, mode transitions, coaxial cables and a vector network analyzer (VNA). The inaccuracies in free-space measurements are due to two main sources of errors. 1) Diffraction effects at the edges of the material specimen. 2) Multiple reflection between horn lens antennas and mode transitions via the surface of the sample. The spot-focusing antennas are used for minimizing diffraction effects and free-space LRL (line, reflect, line) calibration method implemented on VNA eliminates errors due to multiple reflections. The time domain gating or smoothing feature of VNA is used to reduce post calibration errors in reflection and transmission measurements. In this paper, complex reflection coefficients were measured using FSMM system for silicon wafers backed by a metal plate. It was observed that the dielectric constants of the silicon wafers are higher than the values reported for intrinsic silicon wafers which maybe due to the presence of highly conductive epitaxial layer doped on the wafers. Results are reported in the frequency range of 8.0-12.5 GHz.
Sponsorship	Mems Technol.(M) Sdn, Bhd Kriptic Devices (M) Sdn Bhd IEEE Electron Devices Soc
Starting Page	561
Ending Page	565
File Size	294810
Page Count	5
File Format	PDF
ISBN	0780375785
DOI	10.1109/SMELEC.2002.1217886
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-12-19
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nondestructive testing Semiconductor device testing Frequency Antenna measurements Reflection Silicon Microwave measurements Lenses Horn antennas Diffraction
Content Type	Text
Resource Type	Article

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