NDLI: Magnetically-actuated dielectric cantilever RF MEMS switches

Content Provider	IEEE Xplore Digital Library
Author	Fomani, A.A. Fouladi, S. Mansour, R.R.
Copyright Year	2010
Description	Author affiliation: Center for Integrated RF Engineering (CIRFE), University of Waterloo, Ontario, Canada (Fomani, A.A.; Fouladi, S.; Mansour, R.R.)
Abstract	Fully integrated novel magnetically-actuated dielectric cantilever MEMS switches suitable for high frequency RF applications are reported. A four-mask fabrication process has been developed to produce the MEMS switches with integrated current coils on both the substrate and the dielectric cantilever. The switches are actuated using an electromagnetic force and held in the DOWN state using an electrostatic force. DC actuation currents around 110 mA have been measured to be sufficient for operating the switch. The beam is maintained at DOWN state with the application of a potential difference as low as 24 V between the coils. In terms of the RF performance, the insertion and return losses are lower than −0.3 dB and −24 dB, respectively; and isolation is higher than 34 dB up to 10 GHz. To enhance the switch reliability, it is feasible to force the device into the UP state using a repulsive electromagnetic force in the case of release failure or stiction.
Starting Page	296
Ending Page	299
File Size	1014835
Page Count	4
File Format	PDF
ISBN	9781424460564
ISSN	0149645X
e-ISBN	9781424460588
e-ISBN	9781424460571
DOI	10.1109/MWSYM.2010.5516847
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-05-23
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Radiofrequency microelectromechanical systems Magnetic switching Switches Dielectric substrates Microswitches Radio frequency Coils Electromagnetic forces Fabrication Electrostatics RF MEMS Dielectric cantilever Magnetic actuation MEMS Switch
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electrical and Electronic Engineering Radiation

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in