NDLI: Concurrent Enhancement of Q and Power Handling in Multi-Tether High-Order Extensional Resonators

Content Provider	IEEE Xplore Digital Library
Author	Shahmohammadi, M. Harrington, B. P. Abdolvand, R.
Copyright Year	2010
Description	Author affiliation: Oklahoma State University, Tulsa, United States (Shahmohammadi, M.; Harrington, B. P.; Abdolvand, R.)
Abstract	In this paper we demonstrate that quality factor (Q) and power handling, two inherently divergent characteristics of a resonator, can be improved simultaneously by designing high-order harmonic resonant structures anchored with multiple tethers. We show that in thin-film piezoelectric-on-substrate (TPoS) resonators, the quality factor is significantly altered by varying the resonator's thickness, but the resonator's power handling is often traded off for the higher Q. Q's measured from TPoS resonators fabricated on a 30µm thick silicon substrate are up to 3 times higher than the values measured for devices on 20µm thick substrate while maximum deliverable power (at the bifurcation point) to the same device is reduced from 2.5dBm to −0.3dBm. In contrast, it is observed that the maximum deliverable power in a multi-tether ∼1GHz resonator is enhanced by more than 5dBm compared to an identical single-pair tethered resonator (7dBm versus 1.9dBm) and the Q is also increased by 55%.
Starting Page	1
Ending Page	1
File Size	103650
Page Count	1
File Format	PDF
ISBN	9781424460564
ISSN	0149645X
e-ISBN	9781424460588
e-ISBN	9781424460571
DOI	10.1109/MWSYM.2010.5516022
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-05-23
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Q factor Power measurement Q measurement Thickness measurement Substrates Power system harmonics Resonance Piezoelectric films Semiconductor thin films Thin film devices
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electrical and Electronic Engineering Radiation

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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