NDLI: Optical and electrical diagnostics on extended Dielectric Barrier Discharge source

Content Provider	IEEE Xplore Digital Library
Author	Jungmi Hong Yui Lun Wu Zihao Ouyang Cho, T.S. Ruzic, D.N.
Copyright Year	2011
Description	Author affiliation: Center for Plasma Material Interactions, University of Illinois at Urbana Champaign, 201 S. Goodwin Urbana, 61801, USA (Jungmi Hong; Yui Lun Wu; Zihao Ouyang; Cho, T.S.; Ruzic, D.N.)
Abstract	The DBD (Dielectric Barrier Discharge) is well known for its great advantages in various kinds of industrial applications and has been widely used in manufacturing process including flat panel displays, thin films and semiconductor packaging. There has been enormous progress on DBD source development and diagnostics to suit these different purposes. At the same time, there are increasing needs for moderate and efficient remote plasma sources in order to avoid electrical damage from microarcs or high energy ion collisions. To this end, a stable remote plasma using an extended DBD source having a stable effective discharge area of 550mm × 40mm was investigated. The electron temperature was measured from a Boltzmann plot based a PLTE (Partial Local Thermodynamic Equilibrium) model and electron density measured from linewidth broadening of H line, with hydrogen insertion for comparison of the direct discharge region in between electrodes and the remote plasma region. The capacitance of DBD electrode as well as discharge energy and discharge power has been investigated with V-Q Lissajous analysis. Surface treatment of glass and polypropylene with various applied voltage and gas flow rates were studied. Combining optical and electrical diagnostics and surface analysis results on treated samples, the atmospheric plasma source for in-line processing was characterized.
Starting Page	1
Ending Page	1
File Size	32762
Page Count	1
File Format	PDF
ISBN	9781612843308
ISSN	07309244
e-ISBN	9781612843292
e-ISBN	9781612843285
DOI	10.1109/PLASMA.2011.5993378
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-26
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fault location Discharges Plasmas Temperature measurement Electrodes Semiconductor device measurement
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Discharge analysis and electrical modeling of a coaxial dielectric barrier discharge (DBD) lamp

Investigation of discharge uniformity in helium dielectric barrier discharge jets

Diagnostics of dielectric barrier discharge plasma and comparison of the results with PIC code

Novel surface dielectric barrier discharge for basic research in plasma medicine

Gas temperature measurement in a dielectric barrier discharge by argon atomic spectral line

Optical and electrical measurements of a novel dielectric barrier discharge system exhibiting species gain

Surface wave microplasma for localized etching

Measurement of barium emitted from thermionic electrodes in steady-state Hg-rare gas discharges

Sterilization efficacy of dielectric barrier discharge on non-uniform surfaces

Optical and electrical diagnostics on extended Dielectric Barrier Discharge source

Similar Documents

Discharge analysis and electrical modeling of a coaxial dielectric barrier discharge (DBD) lamp

Investigation of discharge uniformity in helium dielectric barrier discharge jets

Diagnostics of dielectric barrier discharge plasma and comparison of the results with PIC code

Novel surface dielectric barrier discharge for basic research in plasma medicine

Gas temperature measurement in a dielectric barrier discharge by argon atomic spectral line

Optical and electrical measurements of a novel dielectric barrier discharge system exhibiting species gain

Surface wave microplasma for localized etching

Measurement of barium emitted from thermionic electrodes in steady-state Hg-rare gas discharges

Sterilization efficacy of dielectric barrier discharge on non-uniform surfaces

Optical and electrical diagnostics on extended Dielectric Barrier Discharge source