NDLI: Microwave plasma assisted reactor design for high deposition rate diamond synthesis

Content Provider	IEEE Xplore Digital Library
Author	Gu, Y. Lu, J. Grotjohn, T.A. Schuelke, T. Asmussen, J.
Copyright Year	2011
Description	Author affiliation: Fraunhofer USA, Center for Coatings and Laser Applications, East Lansing, MI 48824 USA (Schuelke, T.) \|\| Michigan State University, East Lansing, 48824, USA (Gu, Y.; Lu, J.; Grotjohn, T.A.; Asmussen, J.)
Abstract	In view of the important, recent, opportunity to commercially synthesize high quality single crystal diamond (SCD) there is a need to continue to improve existing microwave plasma assisted reactor designs that enable high quality and high deposition rate SCD synthesis. It is now widely recognized that both the quality and growth rates of microwave plasma assisted CVD (MPACVD) synthesized diamond are improved by using high power density microwave discharges operating at pressures above 160 Torr [1]. Thus we are developing microwave plasma reactor designs and associated process methods that are both robust and are optimized for high pressure and high power density operation [2], and thereby take advantage of the improved deposition chemistry and physics that exist at high pressures. These reactors operate in the 160–320 Torr pressure regime. Here we describe our the design methodologies, and then we present the specific design details of a 2.45 GHz MPACVD reactor design that enables optimized reactor performance and high growth rate diamond synthesis in the high pressure regime.
Starting Page	1
Ending Page	1
File Size	46625
Page Count	1
File Format	PDF
ISBN	9781612843308
ISSN	07309244
e-ISBN	9781612843292
e-ISBN	9781612843285
DOI	10.1109/PLASMA.2011.5993127
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-06-26
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Cavity resonators Microwave theory and techniques Diamond-like carbon Plasmas
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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