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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Xin, Y. Xu, S.H. Ye, C. Ning, Z.Y. Lu, X.H. Xiang, S.L. Du, W. Huang, S. Chen, J. Cheng, S.H. |
| Copyright Year | 2003 |
| Description | Author affiliation: Dept. of Phys., Suzhou Univ., China (Xin, Y.; Xu, S.H.; Ye, C.; Ning, Z.Y.) |
| Abstract | Summary form only given, as follows. a-C:F:H films, being used as a potential interlayer dielectrics, have recently received much attentions due to low dielectric constant (low k) and high thermal stability. Generally, an appropriate fluorine content in the film can effectively lower the dielectric constant, but excessive fluorine content in the film may always constrain C-C cross-linked structure, which causes a decrease in thermal stability for a-C:F:H films. Therefore, only by adjusting process parameters carefully in the film deposition can a tradeoff between low k and thermal stability be obtained. In this paper, a-C.F H films were prepared with mixture of C/sub 6/H/sub 6/ and CHF/sub 3/ gases by microwave electron cyclotron resonance (ECR) chemical vapor deposition (CVD) method. |
| Sponsorship | Plasma Sci. & Applications Committee of the IEEE Nucl. & Plasma Sci. Soc. Hanyang Univ. Japan Soc. Plasma Res. Assoc. Korea Atomic Energy Res. Inst. Korea Basic Sci. Inst. Korea Vacuum Soc |
| File Size | 88979 |
| File Format | |
| ISBN | 078037911X |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.2003.1229953 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-06-05 |
| Publisher Place | South Korea |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Thermal stability Electrons Cyclotrons Resonance Chemical vapor deposition Temperature Bonding Dielectric constant Hydrogen Semiconductor films |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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