NDLI: Plate wave resonator using rotated Y-cut single crystal LiTaO thin film made by ion implant technology

Content Provider	IEEE Xplore Digital Library
Author	Kando, H. Iwamoto, T. Yoneda, T. Hayakawa, N. Iwamoto, H. Araki, K. Hatsuda, I. Nagao, Y. Yoshii, Y.
Copyright Year	2010
Description	Author affiliation: Murata MFG. Co., Ltd., Nagaokakyoshi, Kyoto, 617-8555, Japan (Kando, H.; Iwamoto, T.; Yoneda, T.; Hayakawa, N.; Iwamoto, H.; Araki, K.; Hatsuda, I.; Nagao, Y.; Yoshii, Y.)
Abstract	Realization of a high frequency resonator for 3.6 GHz-band filter in the International Mobile Telecommunication Advanced (IMT-Advanced) system is desired. It is difficult to accomplish such a high frequency resonator using conventional surface acoustic wave (SAW) technology. The strip width of the inter-digital transducers (IDT) becomes too narrow in the range of 0.2–0.3 µm, because it has a low SAW velocity of approximately 4000 m/s. Therefore, the formation of IDT is challenging. The authors attempted to realize A1 mode Lamb type plate wave air-gap type membrane resonator by using rotated Y-cut single crystal LiTaO thin film. The calculation results of various propagation characteristics in plate wave are presented. Rotated Y-cut single crystal LiTaO thin film is difficult to obtain by conventional thin film methods. We focus on utilization of the $Smart-cut^{®}$ process. $Smart-cut^{®}$ process is usually used for manufacturing of silicon on insulator (SOI) wafers. We show that such technique can be applied to form the membrane structure of a single crystal LiTaO thin film. The plate wave resonator based on rotated Y-cut single crystal LiTaO thin film has a high resonant frequency of 3.38 GHz, a large $k^{2}$ of about 8 %, and the impedance ratio of 63 dB.
Starting Page	920
Ending Page	923
File Size	700760
Page Count	4
File Format	PDF
ISBN	9781424475902
e-ISBN	9784902339215
e-ISBN	9781902339222
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-12-07
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	IEICE Institute of Electronics Informati
Subject Keyword	Crystals Resonant frequency Biomembranes Impedance Films Surface acoustic waves ion implantation plate wave acoustic resonators piezoelectric resonators LiTaO3
Content Type	Text
Resource Type	Article

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