NDLI: Charge-drift elimination in resonant electrostatic MEMS

Content Provider	IEEE Xplore Digital Library
Author	Bahl, G. Salvia, J. Bargatin, I. Yoneoka, S. Melamud, R. Bongsang Kim Chandorkar, S. Hopcroft, M.A. Bahl, R. Howe, R.T. Kenny, T.W.
Copyright Year	2010
Description	Author affiliation: Indian Institute of Technology Delhi, New Delhi, India (Bahl, R.) \|\| Stanford University, California, USA (Bahl, G.; Salvia, J.; Bargatin, I.; Yoneoka, S.; Melamud, R.; Bongsang Kim; Chandorkar, S.; Hopcroft, M.A.; Howe, R.T.; Kenny, T.W.)
Abstract	We present a biasing technique and a novel oscillator architecture for the elimination of frequency drifts in resonant electrostatic MEMS that are caused by the motion of charge present within dielectrics. We demonstrate more than two orders of magnitude improvement in stability for a test device operating as a frequency reference at 1.077 MHz, reducing frequency drift from more than 100 Hz over 3 hours using traditional actuation, down to less than 1.5 Hz variation over 40 hours using the new technique.
Starting Page	108
Ending Page	111
File Size	419811
Page Count	4
File Format	PDF
ISBN	9781424457618
ISSN	10846999
e-ISBN	9781424457649
e-ISBN	9781424457632
DOI	10.1109/MEMSYS.2010.5442555
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-01-24
Publisher Place	Hong Kong, China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonance Electrostatics Micromechanical devices Resonant frequency Polarization Voltage Oscillators Dielectrics Stability Silicon
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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