NDLI: A novel approach for the fabrication of all-polymer microfluidic devices

Content Provider	IEEE Xplore Digital Library
Author	Kalkandjiev, K. Gutzweiler, L. Welsche, M. Zengerle, R. Koltay, P.
Copyright Year	2010
Description	Author affiliation: University of Freiburg - IMTEK, Germany (Kalkandjiev, K.; Gutzweiler, L.; Welsche, M.; Zengerle, R.; Koltay, P.)
Abstract	This paper describes a process sequence for the fabrication of all-polymer microfluidic chips based on the multilayer lamination of TMMF dry resist (TOK, Japan) on a pre-patterned PMMA substrate. The sequence provides a simple way to meet major microfluidic requirements like the fabrication of embedded microchannels, nozzles and interconnecting vias as well as their accurate integration into a chip-interface without additional materials and bonding procedures. We demonstrate the applicability of the sequence by manufacturing and testing a 24-channel TopSpot printhead. Additionally, non-cytotoxicity of TMMF was confirmed in cell culture experiments and different methods for surface modification were investigated.
Starting Page	1079
Ending Page	1082
File Size	1027415
Page Count	4
File Format	PDF
ISBN	9781424457618
ISSN	10846999
e-ISBN	9781424457649
e-ISBN	9781424457632
DOI	10.1109/MEMSYS.2010.5442397
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-01-24
Publisher Place	Hong Kong, China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Microfluidics Resists Microchannel Lithography Substrates Polymers Reservoirs Lamination Manufacturing
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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