NDLI: Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q

Content Provider	IEEE Xplore Digital Library
Author	Harrington, B.P. Shahmohammadi, M. Abdolvand, R.
Copyright Year	2010
Description	Author affiliation: Oklahoma State University, Tulsa, USA (Harrington, B.P.; Shahmohammadi, M.; Abdolvand, R.)
Abstract	In this paper we report a ∼1GHz lateral extensional thin-film piezoelectric-on-substrate (TPoS) resonator with an unloaded quality factor (Q) of 6700 in air (frequency-quality factor product of $6.6×10^{12}),$ a motional impedance of ∼160Ω, and a linear thermal coefficient of frequency of −29ppm. To achieve such low impedance the $21^{st}$ harmonic resonance mode of a single crystalline silicon block is excited while the near-resonance spurs are suppressed by rigidly supporting the resonator with multiple anchors. Results measured from identical devices each supported with various anchor designs are compared and the effectiveness of increasing rigidity to remove the near-resonance distortions is confirmed. With the reported performance in this work, the fabricated ∼1 GHz resonator is suitable for very low-power and low-noise high-frequency oscillator applications.
Starting Page	707
Ending Page	710
File Size	1257468
Page Count	4
File Format	PDF
ISBN	9781424457618
ISSN	10846999
e-ISBN	9781424457649
e-ISBN	9781424457632
DOI	10.1109/MEMSYS.2010.5442310
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-01-24
Publisher Place	Hong Kong, China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Impedance Frequency Piezoelectric films Q factor Thermal factors Resonance Crystallization Silicon Distortion measurement
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Single-chip multiple-frequency VHF low-impedance micro piezoelectric resonators

PN-diode transduced 3.7-GHZ silicon resonator

High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters

High-frequency and low-resonance-impedance lamb wave resonators utilizing the S mode

Quality factors of MEMS gyros and the role of thermoelastic damping

Design of a high-Q, low-impedance, GHz-range piezoelectric mems resonator

5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators

Piezoelectric Thin Films Characterization for MEMS Applications

High frequency micromechanical piezo-on-silicon block resonators

Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q

Similar Documents

Single-chip multiple-frequency VHF low-impedance micro piezoelectric resonators

PN-diode transduced 3.7-GHZ silicon resonator

High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters

High-frequency and low-resonance-impedance lamb wave resonators utilizing the S mode

Quality factors of MEMS gyros and the role of thermoelastic damping

Design of a high-Q, low-impedance, GHz-range piezoelectric mems resonator

5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators

Piezoelectric Thin Films Characterization for MEMS Applications

High frequency micromechanical piezo-on-silicon block resonators

Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q