NDLI: Surface microfluidics fabricated by superhydrophobic nanocomposite photoresist

Content Provider	IEEE Xplore Digital Library
Author	Lingfei Hong Tingrui Pan
Copyright Year	2010
Description	Author affiliation: University of California, Davis, USA (Lingfei Hong; Tingrui Pan)
Abstract	Surface microfluidics can be of potential use in a variety of emerging applications, including biological and chemical analysis, cellular detection and manipulation, and high-throughput pharmaceutical screening. In comparison with the conventional closed-channel microfluidic system, surface microfluidics shows the distinct advantages of simple construction, direct fluidic connection, no cavitation or interphase obstruction, no optical barrier, and reusability. In this paper, we present the first surface microfluidic networks microfabricated by a single-step photolithographic process using a novel superhydrophobic photosensitive nanocomposite. The superhydrophobic photoresist incorporates PTFE nanoparticles into a photosensitive SU-8 matrix, in which superhydrophobicity (contact angle of 160°) is primarily contributed by the extremely low chemical energy and nanotopology of PTFE nanoparticles, while the SU-8 matrix offers photopatternability (lithographic resolution of 10µm) and substrate adhesion. Furthermore, surface microfluidic pumps self-propelled by surface tension force have been fabricated and characterized to demonstrate the applicability of the novel nanocomposite material.
Starting Page	420
Ending Page	423
File Size	608881
Page Count	4
File Format	PDF
ISBN	9781424457618
ISSN	10846999
e-ISBN	9781424457649
e-ISBN	9781424457632
DOI	10.1109/MEMSYS.2010.5442477
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-01-24
Publisher Place	Hong Kong, China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microfluidics Resists Nanobioscience Nanoparticles Chemical analysis Pharmaceuticals Biomedical optical imaging Optical pumping Ultraviolet sources Energy resolution
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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