NDLI: Embedding vertical nanosheets of metals into PDMS with a reusable template engineering

Content Provider	IEEE Xplore Digital Library
Author	Jalabert, L. Sato, T. Kumemura, M. Bolsee, D. Hermans, C. BenMoussa, A. Fujita, H.
Copyright Year	2010
Description	Author affiliation: LIMMS-CNRS/IIS-University of Tokyo, 4-6-1 Komaba, Meguro-ku, 153-8505 (Japan) (Jalabert, L.; Kumemura, M.) \|\| CIRMM-IIS-University of Tokyo, 4-6-1 Komaba, Meguro-ku, 153-8505 (Japan) (Sato, T.; Fujita, H.) \|\| Royal Observatory of Belgium, STCE, Circular Avenue 3, B-1180 Brussels (Belgium) (BenMoussa, A.) \|\| Belgian Institute for Space Aeronomy, Circular Avenue 3, B-1180 Brussels (Belgium) (Bolsee, D.; Hermans, C.)
Abstract	In this work, we report on a novel microfabrication process suitable for macroelectronics, flexible electronics and biological applications. It consists of the embedding of high aspect ratio vertical nanosheets of materials on the surface of polydimethylsiloxane (PDMS) by using a reusable template and a dry-transfer process. Vertical Au-nanosheets (Au-NS) were successfully transferred onto the PDMS surface. Although a high density of embedded vertical nanosheets on the PDMS, the optical properties of the PDMS sheet in transmission were high enough for a low cost and high-resolution flexible photomask application. Sub-micron photolithography was demonstrated using inexpensive UV mask aligner and photoresist.
Starting Page	384
Ending Page	387
File Size	2558228
Page Count	4
File Format	PDF
ISBN	9781424457618
ISSN	10846999
e-ISBN	9781424457649
e-ISBN	9781424457632
DOI	10.1109/MEMSYS.2010.5442484
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-01-24
Publisher Place	Hong Kong, China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nanobioscience Flexible electronics Nanostructured materials Biological materials Optical materials Sheet materials Biomedical optical imaging Costs Lithography Resists
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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