NDLI: Control configuration selection and distributed nonlinear control of surface roughness in a sputtering process

Content Provider	IEEE Xplore Digital Library
Author	Yiming Lou Gangshi Hu Christofides, P.D.
Copyright Year	2007
Description	Author affiliation: Adv. Projects Res. Inc., La Verne (Yiming Lou)
Abstract	This work focuses on control configuration selection and nonlinear control of the roughness of a one-dimensional surface in a sputtering process including two surface micro-processes, diffusion and erosion. The fluctuation of surface height of such a sputtering process can be approximately described by the stochastic Kuramoto-Sivashinsky equation (KSE), a fourth-order nonlinear stochastic partial differential equation (PDE). First, both a spatially distributed control configuration and a spatially invariant control configuration are investigated and the spatially distributed control configuration is found necessary to achieve the desired control objectives. The control problem is then formulated as the one of controlling the surface roughness by manipulating the spatially distributed gas composition across the surface. To perform the nonlinear controller design, we initially formulate the stochastic KSE into a system of infinite nonlinear stochastic ordinary differential equations (ODEs) by using Galerkin's method. A finite-dimensional approximation of the stochastic KSE is then derived that captures the dominant mode contribution to the surface roughness. A nonlinear feedback controller is then designed based on the finite-dimensional approximation. Subsequently, the necessity of regulating the surface roughness through the spatially distributed control configuration and the effectiveness of the proposed nonlinear controller are demonstrated by applying the nonlinear feedback controller to the kinetic Monte Carlo (kMC) model of the sputtering process in numerical simulations.
Starting Page	231
Ending Page	238
File Size	232111
Page Count	8
File Format	PDF
ISBN	9781424414970
ISSN	01912216
DOI	10.1109/CDC.2007.4434563
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-12-12
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Distributed control Rough surfaces Surface roughness Sputtering Stochastic processes Differential equations Partial differential equations Stochastic systems Adaptive control Fluctuations
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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