NDLI: Virtual Process: Concept, Problems and Implementation Framework

Content Provider	IEEE Xplore Digital Library
Author	Xin Zhao Ya-Wei Li Yi-Yun Zhou Liang Ren Gui-Zhang Lu
Copyright Year	2003
Description	Author affiliation: Inst. of Robotics & Information Automatic System, Nankai University, Tianjin, China, 300071. Email: bing@nankai.edu.cn (Xin Zhao)
Abstract	Taking the quantitative dynamic mechanical performance of MEMS device into acount, the accurate 3D geometric model of MEMS devices is very important. In this paper, the concept of virtual process was put forward; and each single process step is simulated by computer graphics at first; in this way, the whole process and typical shape changes are contained in virtual process. Next, the problems involved in realizing the virtual MEMS process are analyzed. Then, an implementation framework of virtual MEMS process based on expert system technology is given. Finally, an example of surface silicon process is realized, which verifies the feasibility of time and precision of implementation frame primarily.
Sponsorship	Lee Found. IEEE Montreal Sect. Candian Soc. Mechanical Eng
Starting Page	659
Ending Page	663
File Size	359255
Page Count	5
File Format	PDF
ISBN	078037777X
DOI	10.1109/ICCA.2003.1595104
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-06-12
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microelectromechanical devices Micromechanical devices Solid modeling Computational modeling Computer simulation Computer graphics Shape Expert systems Silicon Expert System (ES) MEMS Virtual Process Virtual Reality (VR)
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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