NDLI: A capacitive low-g three-axis accelerometer

Content Provider	IEEE Xplore Digital Library
Author	Hsu, Y.W. Chien, H.T. Lin, C.S. Liao, L.P. Chen, S. Chang, P.
Copyright Year	2008
Description	Author affiliation: Micro Syst. Technol. Center, Ind. Technol. Res. Inst., Tainan (Hsu, Y.W.; Chien, H.T.; Lin, C.S.; Liao, L.P.; Chen, S.; Chang, P.)
Abstract	This paper presents a compact accelerometer which integrates three spring-proof mass systems on a single structure for sensing three-axis motion in size of 1.3 times 1.28 $mm^{2}$ for operating range of plusmn 2 g. SOG-bulk micromachining and DRIE are adopted to fabricate this accelerometer with high aspect-ratio sensing structure and high yield. This accelerometer shows excellent z-axis output sensitivity and resolution as high as 1.434 V/g and 49 mug/radic(Hz) respectively. For the performances of in-plane accelerometers, the sensitivity and minimum cross-axis sensitivity are 1.442 V/g and 0.03% for x-axis accelerometer and are 1.241 V/g and 0.21% for y-axis accelerometer. From the characterization, this accelerometer design demonstrates high cross-axis sensitivity immunity, high sensitivity, and good linearity for both in-plane and out-of-plane accelerometers that suggests this three-axis accelerometer to be potential for satisfying the needs of future applications to consumer and cell phone market.
Starting Page	325
Ending Page	328
File Size	4700990
Page Count	4
File Format	PDF
ISBN	9781424436200
DOI	10.1109/EMAP.2008.4784294
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-22
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accelerometers
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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