NDLI: Impact of molybdenum contamination on stacking faults in epitaxial silicon

Content Provider	IEEE Xplore Digital Library
Author	McCormick, M. Porath, P.
Copyright Year	2015
Description	Author affiliation: Implant Process Eng., ON Semicond., Pocatello, ID, USA (McCormick, M.; Porath, P.)
Abstract	While contamination of $BF_{2}^{+}$ implants by double charged molybdenum has been well documented, the impact of that contamination on antimony implants has not been investigated and is the subject of this study. Many advanced power processes incorporate buried p and n regions created by implanting the substrate prior to growing the final epitaxial silicon layer. One such process is our 0.35um 80V HV CMOS process used in this study. For n-type regions, either arsenic or antimony is typically implanted. Antimony has the advantage of lower diffusion coefficients and therefore less auto-doping issues during the epitaxial silicon process compared with arsenic. While low levels of molybdenum contamination during the antimony implant will not impact the process, it was found that higher levels of contamination, above 3.2 $×10^{11}$ $ions/cm^{2},$ can create both `mound' defects (Figure 2) and planar stacking faults (Figure 3) in the epitaxial silicon layer. For the specific process studied, the estimated yield impact is approximately 0.5%.
Starting Page	167
Ending Page	168
File Size	108142
Page Count	2
File Format	PDF
ISBN	9781479999309
DOI	10.1109/ASMC.2015.7164462
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-05-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Contamination Implants Ions Stacking Epitaxial growth Silicon
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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