NDLI: MEMS manufacturing solutions

Content Provider	IEEE Xplore Digital Library
Author	Fukui, J. Osanai, M. Mizoroke, S. Khorram, H.R.
Copyright Year	2015
Description	Author affiliation: Nikon Precision Inc., Belmont, CA, USA (Khorram, H.R.) \|\| Nikon Eng. Co., Ltd., Yokohama, Japan (Fukui, J.; Osanai, M.; Mizoroke, S.)
Abstract	Reducing time to market and cost-of-ownership is essential to MEMS makers. Therefore, lithography tools that continue to provide new, flexible, and versatile substrate alignment solutions, including backside alignment capabilities, are crucial factors in optimizing MEMS processes for faster production ramps. In order to determine the alignment technique that delivers optimal accuracy and throughput, it is necessary for MEMS manufacturers to be able to quickly evaluate a variety of front and backside alignment scenarios, and determine the best conditions for their specific MEMS processes. Various alignment methods available using Nikon MEMS steppers can achieve high overlay accuracy for non-EGA (Enhanced Global Alignment) applicable wafers, as well as for other substrates used in MEMS, LED, and ABS (air bearing surface) production. High overlay accuracy can also be achieved for applications that include exposure of both sides of the wafer such as MEMS and Power Devices. Newly developed Nikon MEMS Stepper alignment methods significantly enhance overlay optimization and performance capabilities, and contribute to reduction in MEMS time to market.
Starting Page	356
Ending Page	361
File Size	585586
Page Count	6
File Format	PDF
ISBN	9781479999309
DOI	10.1109/ASMC.2015.7164419
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-05-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accuracy Micromechanical devices Throughput Substrates Production Microscopy Manufacturing TAIKO MEMS ABS Power Device Backside Alignment SiC
Content Type	Text
Resource Type	Article

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