NDLI: Automatic metrology algorithm identification using Pattern Matching

Content Provider	IEEE Xplore Digital Library
Author	Fischer, D.S. Akid, K. Abdelhaliem, D. Abed, I.S. LeBritton, J. Opitz, J. Dragiewicz, N. McGinty, C. Lavigne, E.
Copyright Year	2015
Description	Author affiliation: Dev. Metrol., IBM Syst. & Dev. Group, NY, USA (Fischer, D.S.; Akid, K.; Lavigne, E.) \|\| Mentor Graphics Corp. Design to Silicon, OR, USA (LeBritton, J.; Opitz, J.; Dragiewicz, N.; McGinty, C.) \|\| Design to Silicon, Mentor Graphics Corp., Cairo, Egypt (Abdelhaliem, D.; Abed, I.S.)
Abstract	The number of measurement points and their types are increasing with the increasing challenges of the new technology nodes. The industry is challenged to enhance and automate the current Design Based Metrology (DBM) recipe generation flow. This paper describes a novel methodology based on Pattern Matching (PM) to automate the flow of assigning the metrology algorithm parameter to each measurement location. Each measurement location in the design space is examined against a pre-populated database of patterns to select the proper metrology algorithm. The proposed technique increases the speed and efficiency of assigning this parameter to each location, and hence increases the speed of CD-SEM recipe generation. This novel flow is expected to ensure consistency between process characterization, modeling, verification and product monitoring and control.
Starting Page	124
Ending Page	129
File Size	1514124
Page Count	6
File Format	PDF
ISBN	9781479999309
DOI	10.1109/ASMC.2015.7164482
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-05-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Libraries Metrology Algorithm design and analysis Pattern matching Layout Engines Buildings Pattern Matching CD-SEM Metrology Metrology Algorithm
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Investigating SEM-contour to CD-SEM matching

Test Instrumentation and Pattern Matching for Automatic Failure Identification

Lightweight analysis of operational specifications using inference graphs

Efficient identification of design patterns with bit-vector algorithm

A New Multi-pattern Matching Algorithm Based on Frequently Used Group

Stereo matching using both orthogonal and multiple image pairs

Performance-driven layout through device sizing

An improved algorithm of multiple pattern matching

Analog layout synthesis with knowledge mining

Automatic metrology algorithm identification using Pattern Matching

Similar Documents

Investigating SEM-contour to CD-SEM matching

Test Instrumentation and Pattern Matching for Automatic Failure Identification

Lightweight analysis of operational specifications using inference graphs

Efficient identification of design patterns with bit-vector algorithm

A New Multi-pattern Matching Algorithm Based on Frequently Used Group

Stereo matching using both orthogonal and multiple image pairs

Performance-driven layout through device sizing

An improved algorithm of multiple pattern matching

Analog layout synthesis with knowledge mining

Automatic metrology algorithm identification using Pattern Matching