NDLI: Modeling and dispatching refinement for implantation to reduce the probability of tuning beam

Content Provider	IEEE Xplore Digital Library
Author	Kai-Ting Yang Leo Ke Shen, T.
Copyright Year	2015
Description	Author affiliation: Manuf. Technol. Center, Taiwan Semicond. Manuf. Co., Hsinchu, Taiwan (Kai-Ting Yang; Leo Ke; Shen, T.)
Abstract	Implantation equipment is expected to possess the highest possible productivity due to the short process time in a semiconductor manufacturing factory. The setup time of implantation plays a more important role in improving tool productivity as compared with other processes. Dedicated tools for individual recipe groups avoid setup occurrence but lead to low tool utilization and high equipment cost. Restraining the occurrence of setup is necessary for improving productivity in implant area. Aiming at how to improve same recipe rate, a novel dispatching algorithm is proposed in this paper, which politically selects timings of changing recipes for lots with Q-time constraints according to queue lengths of individual recipes. The proposed algorithm let the interruptions due to Q-time issue can be coupled with unavoidable recipe changes which are caused by that tools exhaust some kind of lots. Compared to the conventional dispatching in which the lots with low arrival rates would interrupt continuous production runs of tools when they almost suffer Qtime over, the rate of tuning beams can be reduced by 12%.
Starting Page	190
Ending Page	194
File Size	301241
Page Count	5
File Format	PDF
ISBN	9781479999309
DOI	10.1109/ASMC.2015.7164467
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-05-03
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Dispatching Tuning Productivity Manufacturing Implants Throughput same recipe rate qtime implantation tool productivity
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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