NDLI: Effect of UV-Ozone Treatment on the Performance of ZnO TFTs Fabricated by RF Sputtering Deposition Technique

Content Provider	IEEE Xplore Digital Library
Author	Jia-Ling Wu Han-Yu Lin Po-Hung Kuo Bo-Yuan Su Sheng-Yuan Chu Yu-Cheng Chen Su-Yin Liu Chia-Chiang Chang Chin-Jyi Wu
Copyright Year	1963
Abstract	In this paper, bottom-gate thin-film transistors (TFTs) with zinc oxide (ZnO) channels were grown on Si substrates with an SiO₂ dielectric layer via the radio-frequency sputtering technique. The ZnO films were then subjected to 16 min of ultraviolet (UV)-ozone treatment, which resulted in fewer oxygen vacancies, enhanced crystallization, lower strain, lower surface roughness, and higher thin-film density, as well as improved surface energy and adhesion properties of the gallium zinc oxide source/drain electrodes. The UV-ozone 16-min ZnO active layer TFT with the preferable resistivity values by Hall measurement results. The optimal UV-ozone treatment time (16 min) led to the smallest full-width at half-maximum (0.4138°), smallest strain (2.61 × 10^-3), highest thin-film density (5.78 g/cm³), lowest surface roughness (1.75 nm), and largest surface energy (65.3 mJ/m²). The saturation mobility, subthreshold voltage, ON/OFF current ratio, and trap density of the ZnO TFTs with optimal UV-ozone treatment were 4.54 cm² V^-1 S^-1, 0.28 V/decade, 2.02 × 10⁷, and 2.61 × 10¹¹ eV^-1 cm^-2, respectively, indicating the potential of this structure to be applied to large-area flat-panel displays.
Sponsorship	IEEE Electron Devices Society
Starting Page	1403
Ending Page	1409
Page Count	7
File Size	3852696
File Format	PDF
ISSN	00189383
Volume Number	61
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Zinc oxide Surface treatment Rough surfaces Surface roughness Thin film transistors Strain Electrodes ZnO TFTs Adhesion properties surface energy thin-film densities UV-ozone treatment
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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