NDLI: Determination of copper nanoparticle size distributions with total reflection X-ray fluorescence spectroscopy.

Content Provider	World Health Organization (WHO)-Global Index Medicus
Author	Singh, Andy Luening, Katharina Brennan, Sean Homma, Takayuki Kubo, Nobuhiro Nowak, Stanislaw H. Pianetta, Piero
Description	Country affiliation: United States Author Affiliation: Singh A ( Stanford Synchrotron Radiation Laboratory, 2575 Sand Hill Road, Stanford, CA 94025, USA.); Luening K ( Stanford Synchrotron Radiation Laboratory, 2575 Sand Hill Road, Stanford, CA 94025, USA.); Brennan S ( Stanford Synchrotron Radiation Laboratory, 2575 Sand Hill Road, Stanford, CA 94025, USA.); Homma T ( Department of Applied Chemistry, Waseda University, Shinjuku, Tokyo 169-8555, Japan.); Kubo N ( Department of Applied Chemistry, Waseda University, Shinjuku, Tokyo 169-8555, Japan.); Nowak SH ( Stanford Synchrotron Radiation Laboratory, 2575 Sand Hill Road, Stanford, CA 94025, USA.); Pianetta P ( Stanford Synchrotron Radiation Laboratory, 2575 Sand Hill Road, Stanford, CA 94025, USA.)
Abstract	Total reflection X-ray fluorescence (TXRF) analysis is extensively used by the semiconductor industry for measuring trace metal contamination on silicon surfaces. In addition to determining the quantity of impurities on a surface, TXRF can reveal information about the vertical distribution of contaminants by measuring the fluorescence signal as a function of the angle of incidence. In this study, two samples were intentionally contaminated with copper in non-deoxygenated and deoxygenated ultrapure water (UPW) resulting in impurity profiles that were either atomically dispersed in a thin film or particle-like, respectively. The concentration profile of the samples immersed into deoxygenated UPW was calculated using a theoretical concentration profile representative of particles, yielding a mean particle height of 16.1ânm. However, the resulting theoretical profile suggested that a distribution of particle heights exists on the surface. The fit of the angular distribution data was further refined by minimizing the residual error of a least-squares fit employing a model with a Gaussian distribution of particle heights about the mean height. The presence of a height distribution was also confirmed with atomic force microscopy measurements.
File Format	HTM / HTML
ISSN	09090495
Issue Number	Pt 1
Journal	Journal of Synchrotron Radiation
Volume Number	24
e-ISSN	16005775
Language	English
Publisher	IUCr
Publisher Date	2017-01-01
Publisher Place	United States
Access Restriction	Subscribed
Subject Keyword	Discipline Radiology
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Instrumentation Radiation

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