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| Content Provider | IET Digital Library |
|---|---|
| Author | Jurčíček, Petr Zou, Helin Zhang, Shuiping Liu, Chong |
| Abstract | The design and fabrication of hollow out-of-plane silicon microneedles that mimic the function and dimensions of a mosquito's mouthparts are proposed. Two-step etching and deep reactive ion etching from both sides of the wafer were used to etch the boreholes completely and to ensure the holes have lateral smoothness. Microneedles composed of {411} exterior crystal planes were formed by anisotropic etching in 40% KOH solution at a water-bath temperature of 87°C. Finally, hollow silicon microneedles with a shank height of 100–120 µm and needle borehole diameter of 10–25 µm were fabricated. Flow rate tests using hollow microneedles were performed and demonstrated that the correlation between the flow rate and the inner diameter follows the Hagen-Poiseuille law. Sample tests were performed using pig skin and have shown that the microneedles have sufficient strength to withstand breakup. The microneedles, that the authors fabricated by using the microelectromechanical system, have potential applications in painless transdermal drug delivery systems. |
| Starting Page | 78 |
| Ending Page | 81 |
| Page Count | 4 |
| Volume Number | 8 |
| e-ISSN | 17500443 |
| Issue Number | Issue 2, Feb (2013) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/8/2 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2012.0903 |
| Journal | Micro & Nano Letters |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Anisotropic Etching Applied Fluid Mechanics Deep Reactive Ion Etching Design And Modelling of MEMS And NEMS Device Elemental Semiconductor Exterior Crystal Planes Fabrication of MEMS And NEMS Device Flow Rate Tests Flows in Ducts, Channel, And Conduits Hagen-Poiseuille Law Hollow Out-of-plane Silicon Microneedle Design Hollow Out-of-plane Silicon Microneedle Fabrication Inner Diameter Laminar Flows Lateral Smoothness Microelectromechanical System Microfluidics Micromechanical And Nanomechanical Device And System Mosquito Mouthpart Dimensions Mosquito Mouthpart Function Needle Borehole Diameter Painless Transdermal Drug Delivery System Pig Skin Pipe Flow Plasma Application in Manufacturing And Material Processing Poiseuille Flow Semiconductor Growth Semiconductor Technology Shank Height Silicon Size 10 Mum to 25 Mum Size 100 Mum to 120 Mum Sputter Etching Surface Topography Measurement Surface Treatment And Coating Technique Temperature 87 DegC Two-step Etching Water-bath Temperature |
| Content Type | Text |
| Resource Type | Article |
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