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| Content Provider | IET Digital Library |
|---|---|
| Author | Wei, Xueyong Seshia, Ashwin A. |
| Abstract | A report is presented on a differential piezoresistive sensing approach for transducing the motional response of bulk-mode micromechanical resonators. High-frequency bulk-mode micoresonators have inherently high stiffness and demonstrate limited range of motion, which in turn presents challenges for the capacitive sensing method in the presence of large parasitic feedthrough. A differential piezoresistive sensing approach is implemented in this Letter to substantially reject the effects of parasitic capacitive feedthrough, leaving the response recovered directly from the measurement. With differential pick-up, a 33 dB drop of feedthrough has been achieved and a resonant peak magnitude of 14 dB is obtained for a drain current of 1 mA, which is shown to be approximately 20 times higher than that obtained for the conventional piezoresistive sensing scheme. This method also enables a low DC voltage for capacitively driving the bulk-mode resonator. As an example, a resonant peak magnitude of 5 dB is demonstrated using 3.55 mA drain current and 5 V DC driving voltage. |
| Starting Page | 107 |
| Ending Page | 110 |
| Page Count | 4 |
| Volume Number | 8 |
| e-ISSN | 17500443 |
| Issue Number | Issue 2, Feb (2013) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/8/2 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2012.0789 |
| Journal | Micro & Nano Letters |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Bulk-mode Micromechanical Resonator Capacitive Sensing Method Capacitive Sensor Current 1 MA Design And Modelling of MEMS And NEMS Device Differential Pick-up Differential Piezoresistive Sensing Approach Drain Current Fabrication of MEMS And NEMS Device Feedthrough Drop Gain 33 DB Large Parasitic Feedthrough Micromechanical And Nanomechanical Device And System Micromechanical Resonator Microsensors And Nanosensors Motion Range Motional Response Parasitic Capacitive Feedthrough Effect Piezoresistive Device Piezoresistive Sensing Scheme Resistor Resonant Peak Magnitude Sensing And Detecting Device Sensing Device And Transducers Stiffness Voltage 5 V |
| Content Type | Text |
| Resource Type | Article |
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