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| Content Provider | IET Digital Library |
|---|---|
| Author | Kim, Y. Lee, Jong Hyun Kim, S. M. Rhee, S. I. Song, J. Y. |
| Abstract | The fabrication of a flexible electronic system which consists of a flexible polyimide (PI) substrate and a rigid silicon thin chip is demonstrated. The 50 μm thick rigid silicon chips are bonded to the PI substrate using a die attach film (20 μm) and electrically interconnected to an adjacent metal pad which is deposited on the PI substrate and silicon chips. A 3D step covered interconnection consisted of silver nanoparticles and polymer are achieved by using an electrohydrodynamic system. The mechanical and electrical characteristic was investigated by performing a Kelvin resistance measurement on the jetted lines while the substrate was subjected to bending modes of varying diameters. |
| Starting Page | 1039 |
| Ending Page | 1041 |
| Page Count | 3 |
| ISSN | 00135194 |
| Volume Number | 52 |
| e-ISSN | 1350911X |
| Issue Number | Issue 12, Jun (2016) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/el/52/12 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/el.2016.0047 |
| Journal | Electronics Letters |
| Publisher Date | 2016-05-11 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | 3D Step Covered Interconnection Adjacent Metal Pad Damage-free Three-dimensional Step Covered Interconnection Method Die Attach Film Electrical Characteristic Electrohydrodynamic Jetting Electrohydrodynamic System Electrohydrodynamics Elemental Semiconductor Flexible Electronic System Flexible Electronics Flexible Polyimide Substrate Hybrid System in Flexible HySiF Integrated Circuit Interconnections Kelvin Resistance Measurement Mechanical Characteristic Metallisation And Interconnection Technology Microassembling Microassembly Technique Nanoparticle PI Substrate Polymer Rigid Silicon Thin Chip Semiconductor Integrated Circuit Semiconductor Thin Film Silicon Silver NanoParticle Size 20 Mum Size 50 Mum |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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