NDLI: Study of nonlinear pull-in voltage effects in electrostatic cantilever-based MEMS sensors

Content Provider	IEEE Xplore Digital Library
Author	Shoaib, M. Hamid, N.H.B. Zain Ali, N.B.B. Jan, M.T. Mirza, A.
Copyright Year	2014
Description	Author affiliation: Dept. of Electr. & Electron. Eng., Univ. Teknol. PETRONAS, Tronoh, Malaysia (Shoaib, M.; Hamid, N.H.B.; Zain Ali, N.B.B.; Jan, M.T.; Mirza, A.)
Abstract	This paper presents new investigations to improve dynamic behavior of electrostatic cantilever based MEMS sensors by reducing pull-in voltage nonlinearity. It is believe that pull-in voltage is one of the major factors to generate pull-in force that induces parasitic pull-in frequency as a result the behavior of MEMS sensor become nonlinear. The dynamic behavior of the device is modeled under the pull-in force. The results of numerical simulation of nonlinear model show that pull-in nonlinear force participate to generate an opposite parasitic pull-in frequency. The effect of dielectric on pull-in force and pull-in frequency is analyzed by varying the thickness of dielectric layer at different applied. It is found that increasing the dielectric thickness reduces the pull-in nonlinear factors. Simulink tool is also used to model the schematic of complete electromechanical actuation and sensing of the device. The results show that output current of the device depends on the thickness of dielectric layer.
Sponsorship	Malaysia Sect. CAS Chapt.
Starting Page	1
Ending Page	5
File Size	746330
Page Count	5
File Format	PDF
e-ISBN	9781479946532
DOI	10.1109/ICIAS.2014.6869509
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-06-03
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	modeling Force Dielectrics Simulink Equations pull-in voltage Micromechanical devices cantilever electrostatic equilibrium Dynamics MEMS Sensors Electrostatics nonlinear dynamics
Content Type	Text
Resource Type	Article

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