NDLI: Frequency analysis of electrostatic cantilever-based MEMS sensor

Content Provider	IEEE Xplore Digital Library
Author	Shoaib, M. Hisham, N. Basheer, N. Tariq, M.
Copyright Year	2015
Description	Author affiliation: Dept. of Electr. & Electron. Eng., Univ. Teknol. PETRONAS, Tronoh, Malaysia (Shoaib, M.; Hisham, N.; Basheer, N.; Tariq, M.)
Abstract	This paper presents an analytical approach to model the dynamic behavior and predict the frequency of electrostatic cantilever based MEMS (Microelectromechanical system) sensor for mass detection. The concept of dynamic mass is used to formulate the resonance frequency in damped and undamped medium. In the modeling, electrostatic force is coupled with the bending moment of cantilever to produce actuation at a resonance frequency. Mass of blood cells is used as an external load on the cantilever which results in shift in resonance frequency. This shift due to additional mass is sensed by the piezoresistive mechanism. The device analytical model is integrated using Simulink tool to study the dynamic behavior. The same device is then designed using COMSOL tool and FEM analysis is performed. The analytical results are compared with the simulated results.
Starting Page	1
Ending Page	6
File Size	621010
Page Count	6
File Format	PDF
ISBN	9781479986279
e-ISBN	9781479986255
DOI	10.1109/DTIP.2015.7161013
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-04-27
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Force frequency shift Simulink analytical model Blood cantilever Dynamics Resonant frequency MEMS Mathematical model Electrostatics COMSOL Piezoresistance
Content Type	Text
Resource Type	Article

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