NDLI: Modeling and microfabrication of a CMOS resonator for magnetic field measurement

Content Provider	IEEE Xplore Digital Library
Author	Ahmad, F. Dennis, J.O. Khir, M.H.M. Hamid, N.H.
Copyright Year	2012
Description	Author affiliation: Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS, Bandar Seri Iskandar 31750 Tronoh, Perak DarulRidzuan, Malaysia (Dennis, J.O.) \|\| Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, Bandar Seri Iskandar 31750 Tronoh, Perak DarulRidzuan, Malaysia (Ahmad, F.; Khir, M.H.M.; Hamid, N.H.)
Abstract	This paper presents the modeling and microfabrication of a CMOS resonant magnetic field sensor capable of measuring magnetic field in the range of nanotesla. This sensor is based on differential electrostatic along with Lorentz force actuation and piezoresistive sensing. Cadence virtuoso layout is used to design the resonant magnetic sensor for fabrication. Using microfabrication facilities of MIMOS Bhd all CMOS layers i.e. three metal and two poly layers are used to fabricate the magnetic sensor to enhance the sensitivity. At sensor output, without any amplification its sensitivity is 1.4807 μV/μT at 0.001 damping ratio with quality factor 500 and resonant frequency 9.35 kHz.
Starting Page	701
Ending Page	706
File Size	1410038
Page Count	6
File Format	PDF
ISBN	9781457719684
e-ISBN	9781457719677
DOI	10.1109/ICIAS.2012.6306104
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-06-12
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Lorentz covariance MEMS Resonators Interdigitated fingers Magnetic sensors Metals Resonant frequency Differential electrostatic actuators and PZR sensing CMOS integrated circuits Lorentz force Magnetic fields Electrostatic actuators
Content Type	Text
Resource Type	Article

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