NDLI: Characterization and simulation of optimized micro paddle bridge resonator for magnetic field measurements

Content Provider	IEEE Xplore Digital Library
Author	Ahmad, F. Hamid, N.H. Khir, M.H.M. Dennis, J.O.
Copyright Year	2011
Description	Author affiliation: Department of Electrical and Electronic, Engineering, Universiti Teknologi PETRONAS, Bandar Seri Iskandar 31750 Tronoh, Perak, DarulRidzuan. Malaysia (Ahmad, F.; Hamid, N.H.; Khir, M.H.M.) \|\| Department of Fundamental and Applied Science, Universiti Teknologi PETRONAS, Bandar Seri Iskandar 31750 Tronoh, Perak, DarulRidzuan. Malaysia (Dennis, J.O.)
Abstract	A novel design of micro paddle bridge resonant magnetic field sensor based on electrostatic actuation and capacitive detection technique is characterized and simulated using CoventorWare. The sensor consists of Aluminum plus shape paddle bridge resonator with two proof mass arms, driving electrodes, sensing electrode and silicon substrate. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the resonant frequency is estimated. The results of the device are in accordance with the theoretical values of the designed model. The results indicate its sensitivity 0.252 pA/uT, when operating at 10% of critical damping. The sensitivity and resolution can be enhanced through vacuum packaging.
Starting Page	1
Ending Page	5
File Size	188603
Page Count	5
File Format	PDF
ISBN	9781457700682
e-ISBN	9781457700699
e-ISBN	9781457700675
DOI	10.1109/SIECPC.2011.5876897
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-04-24
Publisher Place	Saudi Arabia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes Sensitivity Magnetic sensor Magnetometers Bridge circuits Resonant frequency Metals Electrostatic actuation Micro paddle bridge resonator CMOS technology Lorentz force Magnetic fields
Content Type	Text
Resource Type	Article

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