NDLI: Post-CMOS processing and DC characterization of a resonant microcantilever for gas sensing

Content Provider	IEEE Xplore Digital Library
Author	Mirza, A. Hamid, N.H. Khir, M.H.M. Dennis, J.O. Ashraf, K.
Copyright Year	2012
Description	Author affiliation: Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS, Bandar Seri Iskandar¸ 31750, Perak, Malaysia (Dennis, J.O.) \|\| Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS, Bandar Seri Iskandar¸ 31750, Perak, Malaysia (Mirza, A.; Hamid, N.H.; Khir, M.H.M.; Ashraf, K.)
Abstract	In recent years MEMS based microresonant sensors have been given a lot of attention due to their potential as a platform for the development of many novel physical, chemical, and biological sensors. Monolithic integration of micro device with electronics can not only lower manufacturing cost but also minimize total system size. However, the curling of composite metal-oxide microstructures in the thin-film CMOS-MEMS process, greatly limits the device size. Deep Reactive Ion Etching (DRIE) technologies have advanced significantly in recent years and by alternating passivation and etching cycle, silicon etch process can typically achieve high aspect ratios between 20:1 to 30:1 that can be used to reduce the curling of the structure. In this paper, post-CMOS processing of a microcantilever, designed for CO2 detection, by using backside DRIE to control the curling and DC characterization of the sensor is reported. In order to estimate the deviation of the parameters from designed values, due to manufacturing tolerance, the DC characteristics of the sensor have also been calculated theoretically. The theoretical value of 1.65 kΩ for piezoresistor and 7.34 kΩ for pick up coil matches with the measured values of 2.15 kΩ and 6.3 kΩ within an error limit of 23% and 16% respectively.
Starting Page	820
Ending Page	824
File Size	851666
Page Count	5
File Format	PDF
ISBN	9781457719684
e-ISBN	9781457719677
DOI	10.1109/ICIAS.2012.6306127
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-06-12
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Coils Micromechanical devices CMOS Resonator Piezoelectric transducers Carbon dioxide Sensor phenomena and characterization Etching Silicon MEMS Sensor
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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