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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Stone, C. Fatikow, S. |
| Copyright Year | 2008 |
| Description | Author affiliation: Div. Microrobotics & Control Eng., Univ. of Oldenburg, Oldenburg (Stone, C.; Fatikow, S.) |
| Abstract | This paper describes the alignment automation of nanotools and nanoparts inside the vacuum chamber of a scanning electron microscope (SEM). As nanopart example carbon nanotubes have been selected and as a nanotool a tip of a scanning tunneling microscope has been chosen. The experimental setup and its control architecture are shown. Different microrobots and sensors can be integrated in a flexible manner using a common control interface within this architecture. The system easily scales up for more complex robot and sensor setups. An automation sequence is proposed and experimental data is evaluated. |
| Starting Page | 160 |
| Ending Page | 165 |
| File Size | 324373 |
| Page Count | 6 |
| File Format | |
| ISBN | 9781424421701 |
| ISSN | 19354576 |
| DOI | 10.1109/INDIN.2008.4618086 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-07-13 |
| Publisher Place | South Korea |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Content Type | Text |
| Resource Type | Article |
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