NDLI: The evolution of automated material handling systems (AMHS) in semiconductor fabrication facilities

Content Provider	IEEE Xplore Digital Library
Author	Dong Il Kim
Copyright Year	2008
Description	Author affiliation: Samsung, Seoul (Dong Il Kim)
Abstract	Summary form only given. The semiconductor industry has increased the size of wafers from 150 mm to 450 mm to improve productivity. This change has necessitated the need for innovations in the sizes of FABs, equipments, and transportation systems. the increase in the size of FABs, in particular, has resulted in many changes in transportation systems. The increase in wafer sizes has led to an increase in front opening unified pod (FOUP) weight, reducing manual handling by operators and bringing to light the importance of automated material handling systems (AMHS). The transportation systems of FABs can be largely divided into intra-bay and inter-bay. The initial 150 mm FABs relied only on overhead shuttles (OHS) for automatic inter-bay transportation, while the 200 mm FABs added automatic guided vehicles (AGV) for automatic intra-bay transportation. The 300 mm FABs introduced a segregated approach where high-speed overhead hoist transports (OHT) are used for intra bay transportation and OHSpsilas are used for inter-bay transportation. The inefficiency of operating intra-bay and inter-bay transportation in a segregated manner in 300 mm FABs has recently been raised, so a unified approach where OHTpsilas are used for both intra- and inter-bay transportation has been developed. Also, side track buffers (STB) and under track buffer (UTB) have been installed on OHT rails to minimize the footprint of stockers, resulting in minimal equipment rundown and reduced turn-around time (TAT) of semiconductor production. The standard for 450 mm fabs is currently being heavily discussed within the International Sematech Manufacturing Initiative (ISMI).
Starting Page	14
Ending Page	14
File Size	159000
Page Count	1
File Format	PDF
ISBN	9781424421701
ISSN	19354576
DOI	10.1109/INDIN.2008.4618055
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-07-13
Publisher Place	South Korea
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Content Type	Text
Resource Type	Synopsis

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Improved Empty Vehicle Balancing in Automated Material Handling Systems

Automated material handling systems: a simulation-based design framework for automated material handling systems in 300mm fabrication facilities

Common AMHS myths [automated material handling systems]

Assessing the impact of the 450mm wafer size transition on manufacturing facility automated material handling systems

Material handling: operational modeling and simulation of an inter-bay AMHS in semiconductor wafer fabrication

A spine layout design method for semiconductor fabrication facilities containing automated material‐handling systems

A Spine Layout Design Method For Semiconductor Fabrication Facilities Containing Automated Material Handling Systems

Optimal vehicle scheduling & layout for automated material handling systems (AMHS)

Dynamic vehicle allocation in Automated Material Handling System

The evolution of automated material handling systems (AMHS) in semiconductor fabrication facilities

Similar Documents

Improved Empty Vehicle Balancing in Automated Material Handling Systems

Automated material handling systems: a simulation-based design framework for automated material handling systems in 300mm fabrication facilities

Common AMHS myths [automated material handling systems]

Assessing the impact of the 450mm wafer size transition on manufacturing facility automated material handling systems

Material handling: operational modeling and simulation of an inter-bay AMHS in semiconductor wafer fabrication

A spine layout design method for semiconductor fabrication facilities containing automated material‐handling systems

A Spine Layout Design Method For Semiconductor Fabrication Facilities Containing Automated Material Handling Systems

Optimal vehicle scheduling & layout for automated material handling systems (AMHS)

Dynamic vehicle allocation in Automated Material Handling System

The evolution of automated material handling systems (AMHS) in semiconductor fabrication facilities