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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Chevillon, N. Mingchun Tang Pregaldiny, F. Lallement, C. Madec, M. |
| Copyright Year | 2009 |
| Description | Author affiliation: InESS, University of Strasbourg, France (Chevillon, N.; Mingchun Tang; Pregaldiny, F.; Lallement, C.; Madec, M.) |
| Abstract | In this paper, we present a FinFET compact model and its associated parameter extraction methodology. This explicit model accounts for all major small geometry effects and allows accurate simulations of both n- and p-type FinFETs. The model core is physics-based (long-channel model) and some semiempirical corrections are introduced in order to accurately simulate the behavior of ultrashort (L = 25 nm) and ultrathin (WSi = 3 nm) FinFETs. The parameter extraction relies on a software suite allowing an automatic parameter extraction. In this work, the development of our parameter extraction procedure is based on 3-D simulation results. The optimization of parameters related to quantum effects, short-channel effects and channel length modulation illustrates the methodology of parameter extraction. Finally, we compare the FinFET characteristics (drain current and small signal parameters) obtained by our explicit compact model with 3-D numerical simulations for different Fin widths and channel lengths. |
| Starting Page | 55 |
| Ending Page | 60 |
| File Size | 157279 |
| Page Count | 6 |
| File Format | |
| ISBN | 9781424447985 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-06-25 |
| Publisher Place | Poland |
| Access Restriction | Subscribed |
| Rights Holder | Tech Univ of Lodz |
| Subject Keyword | Solid modeling quantum effects Semiconductor films FinFET 3-D simulations Parameter extraction Geometry compact model python script parameter extraction optimization Voltage MOSFET circuits FinFETs CMOS technology Silicon Integrated circuit modeling short-channel effects Verilog-A |
| Content Type | Text |
| Resource Type | Article |
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