NDLI: Novel teeter-totter 2-axes MEMS magnetometer with equal sensitivities

Content Provider	IEEE Xplore Digital Library
Author	Farghaly, M.A. Rochus, V. Rottenberg, X. Mohammed, U.S. Tilmans, H.A.C.
Copyright Year	2013
Description	Author affiliation: KACST-Intel Consortium Center of Excellence in Nano-Manuf. Applic. (CENA), Riyadh, Saudi Arabia (Farghaly, M.A.) \|\| IMEC, Leuven, Belgium (Rochus, V.; Rottenberg, X.; Tilmans, H.A.C.) \|\| Dept. of Electr. Eng., Assuit Univ., Assiut, Egypt (Mohammed, U.S.)
Abstract	In this paper, we demonstrate a novel 2-axes MEMS-based resonant magnetic field sensor. It is a compact magnetometer, build in a single MEMS layer, which measures the two in-plane components of magnetic field and this with equal relative sensitivity. Its principle of operation is based on Lorentz force acting on a current carrying conductor placed in a magnetic field B. The force is proportional to the magnetic field B and for this particular design it results in a torque exerted on the microstructure, resulting a rotation (teeter-tooter) motion of the structure, which on its turns is translated into a differential capacitance. The proposed magnetometer design fits a chip area less than 250[μm]×300[μm]. An analytical design approach is described to reach to the equal and maximal relative sensitivity. Using FEM simulations, A relative sensitivity $3547[T^{-1}]$ was reached. The design makes that cross sensitivities between the 2-axes is as small as possible. Also, for the first time, we introduce an equivalent circuit of a torsional MEMS magnetometer. It was developed starting from the known transducers like electrodynamic and electrostatic transducers.
Sponsorship	IEEE Components, Packaging Manuf. Technol. Soc.
Starting Page	1
Ending Page	6
File Size	1773301
Page Count	6
File Format	PDF
ISBN	9781467361385
e-ISBN	9781467361392
DOI	10.1109/EuroSimE.2013.6529972
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-04-14
Publisher Place	Poland
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Magnetometers Abstracts Atmospheric measurements Particle measurements Transducers Bismuth Electrodynamics
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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